Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications

G. Iordache, J. Holleman, A.Y. Kovalgin, T. Jenneboer

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    Abstract

    We have designed and realized a new antifuse hot-spot device to be used in gas sensing applications. The antifuse structure was realized on a suspended membrane to minimize the heat losses. For the sensing of alkanes a procedure for making a porous alumina layer doped with Platinum was developed. The device was electrically characterized and gas sensing experiments were conducted.
    Original languageEnglish
    Title of host publicationSemiconductor Advances for Future Electronics
    Subtitle of host publicationProceedings of SAFE 2003
    Place of PublicationVeldhoven, The Netherlands
    PublisherSTW
    Pages693-696
    Number of pages4
    Publication statusPublished - 25 Nov 2003
    Event6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003 - Veldhoven, Netherlands
    Duration: 25 Nov 200326 Nov 2003
    Conference number: 6

    Conference

    Conference6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003
    Abbreviated titleSAFE
    CountryNetherlands
    CityVeldhoven
    Period25/11/0326/11/03

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  • Cite this

    Iordache, G., Holleman, J., Kovalgin, A. Y., & Jenneboer, T. (2003). Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications. In Semiconductor Advances for Future Electronics: Proceedings of SAFE 2003 (pp. 693-696). Veldhoven, The Netherlands: STW.