We have designed and realized a new antifuse hot-spot device to be used in gas sensing applications. The antifuse structure was realized on a suspended membrane to minimize the heat losses. For the sensing of alkanes a procedure for making a porous alumina layer doped with Platinum was developed. The device was electrically characterized and gas sensing experiments were conducted.
|Title of host publication||Semiconductor Advances for Future Electronics|
|Subtitle of host publication||Proceedings of SAFE 2003|
|Place of Publication||Veldhoven, The Netherlands|
|Number of pages||4|
|Publication status||Published - 25 Nov 2003|
|Event||6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003 - Veldhoven, Netherlands|
Duration: 25 Nov 2003 → 26 Nov 2003
Conference number: 6
|Conference||6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003|
|Period||25/11/03 → 26/11/03|
Iordache, G., Holleman, J., Kovalgin, A. Y., & Jenneboer, T. (2003). Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications. In Semiconductor Advances for Future Electronics: Proceedings of SAFE 2003 (pp. 693-696). Veldhoven, The Netherlands: STW.