Abstract
We have designed and realized a new antifuse hot-spot device to be used in gas sensing applications. The antifuse structure was realized on a suspended membrane to minimize the heat losses. For the sensing of alkanes a procedure for making a porous alumina layer doped with Platinum was developed. The device was electrically characterized and gas sensing experiments were conducted.
| Original language | English |
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| Title of host publication | Semiconductor Advances for Future Electronics |
| Subtitle of host publication | Proceedings of SAFE 2003 |
| Place of Publication | Veldhoven, The Netherlands |
| Publisher | STW |
| Pages | 693-696 |
| Number of pages | 4 |
| Publication status | Published - 25 Nov 2003 |
| Event | 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003 - Veldhoven, Netherlands Duration: 25 Nov 2003 → 26 Nov 2003 Conference number: 6 |
Conference
| Conference | 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003 |
|---|---|
| Abbreviated title | SAFE |
| Country/Territory | Netherlands |
| City | Veldhoven |
| Period | 25/11/03 → 26/11/03 |