APCVD of aluminium oxyde

J. Kruise, H. van Vossen, C.J.M. Eijkel

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Number of pages1
    Publication statusPublished - 17 Feb 1994
    EventDutch Conference on Sensor Technology 1994 - University of Twente, Enschede, Netherlands
    Duration: 17 Feb 199418 Feb 1994

    Conference

    ConferenceDutch Conference on Sensor Technology 1994
    CountryNetherlands
    CityEnschede
    Period17/02/9418/02/94

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