APCVD of aluminium oxyde

J. Kruise, H. van Vossen, C.J.M. Eijkel

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Number of pages1
    Publication statusPublished - 30 Jun 1994
    EventMESA Dag 1994 - Best Western Dish Hotel, Enschede, Netherlands
    Duration: 30 Jun 199430 Jun 1994

    Conference

    ConferenceMESA Dag 1994
    CountryNetherlands
    CityEnschede
    Period30/06/9430/06/94
    Other(MESA Day/Meeting)

    Cite this

    Kruise, J., van Vossen, H., & Eijkel, C. J. M. (1994). APCVD of aluminium oxyde. Poster session presented at MESA Dag 1994, Enschede, Netherlands.