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APCVD of aluminium oxyde

  • J. Kruise
  • , H. van Vossen
  • , C.J.M. Eijkel

    Research output: Contribution to conference › Poster › Other research output

    Original languageEnglish
    Number of pages1
    Publication statusPublished - 17 Feb 1994
    EventDutch Conference on Sensor Technology 1994 - University of Twente, Enschede, Netherlands
    Duration: 17 Feb 1994 → 18 Feb 1994

    Conference

    ConferenceDutch Conference on Sensor Technology 1994
    Country/TerritoryNetherlands
    CityEnschede
    Period17/02/94 → 18/02/94

    • APCVD of aluminium oxyde

      Kruise, J., van Vossen, H. & Eijkel, C. J. M., 30 Jun 1994. 1 p.

      Research output: Contribution to conference › Poster › Other research output

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