APCVD of aluminum oxide

J. Kruise, H. van Vossen, C.J.M. Eijkel

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings National Conference on Sensor Technology 1994
Place of Publication	Universiteit Twente, Enschede
Pages	311-315
Publication status	Published - 17 Feb 1994

Keywords

@inproceedings{77c22a6eacea46bf9cf4d1c19639aeb7,

title = "APCVD of aluminum oxide",

keywords = "METIS-113742",

author = "J. Kruise and {van Vossen}, H. and C.J.M. Eijkel",

year = "1994",

month = feb,

day = "17",

language = "Undefined",

isbn = "90-73461-06-5",

pages = "311--315",

booktitle = "Proceedings National Conference on Sensor Technology 1994",

}