Application of a microflown as a low-cost level sensor

J. van Honschoten; J. van Baar; H.E. de Bree; T. Lammerink; G. Krijnen; M. Elwenspoek

doi:10.1088/0960-1317/10/2/324

Application of a microflown as a low-cost level sensor

J. van Honschoten, J. van Baar, H.E. de Bree, T. Lammerink, G. Krijnen, M. Elwenspoek

Research output: Contribution to journal › Conference article › Academic › peer-review

15 Citations (Scopus)

44 Downloads (Pure)

Abstract

In this paper we present a novel 'spirit level' sensor derived from a well known thermal flow sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out temperature-dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. The theory describing the sensor is presented. The first experiments, using dc signals only, show adequate sensitivity, although high-accuracy operation is hampered by thermal drift.

Original language	English
Pages (from-to)	250-253
Number of pages	4
Journal	Journal of micromechanics and microengineering
Volume	10
Issue number	2
DOIs	https://doi.org/10.1088/0960-1317/10/2/324
Publication status	Published - Jun 2000
Event	10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France Duration: 27 Sept 1999 → 28 Sept 1999 Conference number: 10

Keywords

2023 OA procedure

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1088/0960-1317/10/2/324

VanHonschoten2000applicationAccepted author version, 80.3 KB
ArticleFinal published version, 312 KBLicence: Taverne

15 Citations
1 Conference contribution

Application of a microflown as a low-cost level-sensor
van Honschoten, J. W., van Baar, J. J. J., de Bree, H. E., Lammerink, T. S. J., Krijnen, G. J. M. & Elwenspoek, M. C., 26 Sept 1999, The 10th Micromechanics Europe Workshop, MME '99: September 27-28, 1999, Gif sur Yvette, France : proceedings. Orsay: Université Paris-sud, Institut d'Électronique Fondamentale, p. 124-127
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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title = "Application of a microflown as a low-cost level sensor",

abstract = "In this paper we present a novel 'spirit level' sensor derived from a well known thermal flow sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out temperature-dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. The theory describing the sensor is presented. The first experiments, using dc signals only, show adequate sensitivity, although high-accuracy operation is hampered by thermal drift.",

keywords = "2023 OA procedure",

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AU - van Honschoten, J.

AU - van Baar, J.

AU - de Bree, H.E.

AU - Lammerink, T.

AU - Krijnen, G.

AU - Elwenspoek, M.

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N2 - In this paper we present a novel 'spirit level' sensor derived from a well known thermal flow sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out temperature-dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. The theory describing the sensor is presented. The first experiments, using dc signals only, show adequate sensitivity, although high-accuracy operation is hampered by thermal drift.

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KW - 2023 OA procedure

U2 - 10.1088/0960-1317/10/2/324

DO - 10.1088/0960-1317/10/2/324

M3 - Conference article

SN - 0960-1317

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EP - 253

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T2 - 10th Micromechanics Europe Workshop, MME 1999

Y2 - 27 September 1999 through 28 September 1999

ER -

Application of a microflown as a low-cost level sensor

Abstract

Keywords

UN SDGs

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Research output

Application of a microflown as a low-cost level-sensor

Cite this