Application of a microflown as a low-cost level sensor

J. van Honschoten, J. van Baar, H.E. de Bree, T. Lammerink, G. Krijnen, M. Elwenspoek

    Research output: Contribution to journalConference articleAcademicpeer-review

    15 Citations (Scopus)
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    In this paper we present a novel 'spirit level' sensor derived from a well known thermal flow sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out temperature-dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. The theory describing the sensor is presented. The first experiments, using dc signals only, show adequate sensitivity, although high-accuracy operation is hampered by thermal drift.
    Original languageEnglish
    Pages (from-to)250-253
    Number of pages4
    JournalJournal of micromechanics and microengineering
    Issue number2
    Publication statusPublished - Jun 2000
    Event10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France
    Duration: 27 Sep 199928 Sep 1999
    Conference number: 10


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