In this paper we present a novel 'spirit level' sensor derived from a well known thermal flow sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out temperature-dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. The theory describing the sensor is presented. The first experiments, using dc signals only, show adequate sensitivity, although high-accuracy operation is hampered by thermal drift.
|Number of pages||4|
|Journal||Journal of micromechanics and microengineering|
|Publication status||Published - Jun 2000|
|Event||10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France|
Duration: 27 Sep 1999 → 28 Sep 1999
Conference number: 10