Application of a microflown as a low-cost level-sensor

J.W. van Honschoten; J.J.J. van Baar; H.E. de Bree; T.S.J. Lammerink; G.J.M. Krijnen; M.C. Elwenspoek

Application of a microflown as a low-cost level-sensor

J.W. van Honschoten, J.J.J. van Baar, H.E. de Bree, T.S.J. Lammerink, G.J.M. Krijnen, M.C. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

In this abstract we present a novel "spirit level"-sensor derived from a well-known thermal flow-sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out using temperature dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. Theory describing the sensor is presented. First experiments, using DC signals only, show an adequate sensitivity though high accuracy operation is hampered by thermal drift.

Original language	English
Title of host publication	The 10th Micromechanics Europe Workshop, MME '99
Subtitle of host publication	September 27-28, 1999, Gif sur Yvette, France : proceedings
Place of Publication	Orsay
Publisher	Université Paris-sud, Institut d'Électronique Fondamentale
Pages	124-127
Publication status	Published - 26 Sept 1999
Event	10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France Duration: 27 Sept 1999 → 28 Sept 1999 Conference number: 10

Workshop

Workshop	10th Micromechanics Europe Workshop, MME 1999
Abbreviated title	MME
Country/Territory	France
City	Gif-sur-Yvette
Period	27/09/99 → 28/09/99

Keywords

Vial
Thermal gravity sensor
Spirit level
Microflown

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van Honschoten, J. W., van Baar, J. J. J., de Bree, H. E., Lammerink, T. S. J., Krijnen, G. J. M., & Elwenspoek, M. C. (1999). Application of a microflown as a low-cost level-sensor. In The 10th Micromechanics Europe Workshop, MME '99: September 27-28, 1999, Gif sur Yvette, France : proceedings (pp. 124-127). Université Paris-sud, Institut d'Électronique Fondamentale.

@inproceedings{59652cc9efe6457e893a459db48611e7,

title = "Application of a microflown as a low-cost level-sensor",

abstract = "In this abstract we present a novel {"}spirit level{"}-sensor derived from a well-known thermal flow-sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out using temperature dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. Theory describing the sensor is presented. First experiments, using DC signals only, show an adequate sensitivity though high accuracy operation is hampered by thermal drift.",

keywords = "Vial, Thermal gravity sensor, Spirit level, Microflown",

author = "{van Honschoten}, J.W. and {van Baar}, J.J.J. and {de Bree}, H.E. and T.S.J. Lammerink and G.J.M. Krijnen and M.C. Elwenspoek",

year = "1999",

month = sep,

day = "26",

language = "English",

pages = "124--127",

booktitle = "The 10th Micromechanics Europe Workshop, MME '99",

publisher = "Universit{\'e} Paris-sud, Institut d'{\'E}lectronique Fondamentale",

note = "10th Micromechanics Europe Workshop, MME 1999, MME ; Conference date: 27-09-1999 Through 28-09-1999",

}

van Honschoten, JW, van Baar, JJJ, de Bree, HE, Lammerink, TSJ, Krijnen, GJM & Elwenspoek, MC 1999, Application of a microflown as a low-cost level-sensor. in The 10th Micromechanics Europe Workshop, MME '99: September 27-28, 1999, Gif sur Yvette, France : proceedings. Université Paris-sud, Institut d'Électronique Fondamentale, Orsay, pp. 124-127, 10th Micromechanics Europe Workshop, MME 1999, Gif-sur-Yvette, France, 27/09/99.

Application of a microflown as a low-cost level-sensor. / van Honschoten, J.W.; van Baar, J.J.J.; de Bree, H.E. et al.
The 10th Micromechanics Europe Workshop, MME '99: September 27-28, 1999, Gif sur Yvette, France : proceedings. Orsay: Université Paris-sud, Institut d'Électronique Fondamentale, 1999. p. 124-127.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Application of a microflown as a low-cost level-sensor

AU - van Honschoten, J.W.

AU - van Baar, J.J.J.

AU - de Bree, H.E.

AU - Lammerink, T.S.J.

AU - Krijnen, G.J.M.

AU - Elwenspoek, M.C.

N1 - Conference code: 10

PY - 1999/9/26

Y1 - 1999/9/26

N2 - In this abstract we present a novel "spirit level"-sensor derived from a well-known thermal flow-sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out using temperature dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. Theory describing the sensor is presented. First experiments, using DC signals only, show an adequate sensitivity though high accuracy operation is hampered by thermal drift.

AB - In this abstract we present a novel "spirit level"-sensor derived from a well-known thermal flow-sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out using temperature dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. Theory describing the sensor is presented. First experiments, using DC signals only, show an adequate sensitivity though high accuracy operation is hampered by thermal drift.

KW - Vial

KW - Thermal gravity sensor

KW - Spirit level

KW - Microflown

M3 - Conference contribution

SP - 124

EP - 127

BT - The 10th Micromechanics Europe Workshop, MME '99

PB - Université Paris-sud, Institut d'Électronique Fondamentale

CY - Orsay

T2 - 10th Micromechanics Europe Workshop, MME 1999

Y2 - 27 September 1999 through 28 September 1999

ER -

Application of a microflown as a low-cost level-sensor

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Keywords

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