Application of a microflown as a low-cost level-sensor

J.W. van Honschoten, J.J.J. van Baar, H.E. de Bree, T.S.J. Lammerink, G.J.M. Krijnen, M.C. Elwenspoek

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    In this abstract we present a novel "spirit level"-sensor derived from a well-known thermal flow-sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out using temperature dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. Theory describing the sensor is presented. First experiments, using DC signals only, show an adequate sensitivity though high accuracy operation is hampered by thermal drift.
    Original languageEnglish
    Title of host publicationThe 10th Micromechanics Europe Workshop, MME '99
    Subtitle of host publicationSeptember 27-28, 1999, Gif sur Yvette, France : proceedings
    Place of PublicationOrsay
    PublisherUniversité Paris-sud, Institut d'Électronique Fondamentale
    Publication statusPublished - 26 Sept 1999
    Event10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France
    Duration: 27 Sept 199928 Sept 1999
    Conference number: 10


    Workshop10th Micromechanics Europe Workshop, MME 1999
    Abbreviated titleMME


    • Vial
    • Thermal gravity sensor
    • Spirit level
    • Microflown


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