In this abstract we present a novel "spirit level"-sensor derived from a well-known thermal flow-sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out using temperature dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. Theory describing the sensor is presented. First experiments, using DC signals only, show an adequate sensitivity though high accuracy operation is hampered by thermal drift.
|Title of host publication||Proceedings of Micromechanics Europe '99 Conference|
|Place of Publication||Gif-sur-Yvette|
|Publication status||Published - 26 Sep 1999|
|Event||10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France|
Duration: 27 Sep 1999 → 28 Sep 1999
Conference number: 10
|Workshop||10th Micromechanics Europe Workshop, MME 1999|
|Period||27/09/99 → 28/09/99|
- thermal gravity sensor
- Spirit level
van Honschoten, J. W., van Baar, J. J. J., de Bree, H. E., Lammerink, T. S. J., Krijnen, G. J. M., & Elwenspoek, M. C. (1999). Application of a microflown as a low-cost level-sensor. In Proceedings of Micromechanics Europe '99 Conference (pp. 124-127). Gif-sur-Yvette.