Application of ALE for 3D Electronic Devices

Thorsten Lill; Andreas Fischer; Fred Roozeboom

doi:10.1149/MA2025-02313587mtgabs

Application of ALE for 3D Electronic Devices

Thorsten Lill
, Andreas Fischer
, Fred Roozeboom

Inorganic Membranes

Research output: Contribution to journal › Meeting Abstract › Academic

Original language	English
Pages (from-to)	3587-3587
Journal	Meeting Abstracts of the Electrochemical Society
Volume	MA2025-02
Issue number	31
DOIs	https://doi.org/10.1149/MA2025-02313587mtgabs
Publication status	Published - 24 Nov 2025
Event	248th Electrochemical Society Meeting: United through science and technology - Hilton Chicago, Chicago, United States Duration: 12 Oct 2025 → 16 Oct 2025 Conference number: 28 https://www.electrochem.org/248

Access to Document

10.1149/MA2025-02313587mtgabs

Cite this

@article{0352b23473ea476286bf547c3432dfde,

title = "Application of ALE for 3D Electronic Devices",

author = "Thorsten Lill and Andreas Fischer and Fred Roozeboom",

year = "2025",

month = nov,

day = "24",

doi = "10.1149/MA2025-02313587mtgabs",

language = "English",

volume = "MA2025-02",

pages = "3587--3587",

journal = "Meeting Abstracts of the Electrochemical Society",

issn = "2151-2043",

publisher = "Electrochemical Society",

number = "31",

note = "248th Electrochemical Society Meeting : United through science and technology, 248th ECS Meeting ; Conference date: 12-10-2025 Through 16-10-2025",

url = "https://www.electrochem.org/248",

}

TY - JOUR

T1 - Application of ALE for 3D Electronic Devices

AU - Lill, Thorsten

AU - Fischer, Andreas

AU - Roozeboom, Fred

N1 - Conference code: 28

PY - 2025/11/24

Y1 - 2025/11/24

U2 - 10.1149/MA2025-02313587mtgabs

DO - 10.1149/MA2025-02313587mtgabs

M3 - Meeting Abstract

SN - 2151-2043

VL - MA2025-02

SP - 3587

EP - 3587

JO - Meeting Abstracts of the Electrochemical Society

JF - Meeting Abstracts of the Electrochemical Society

IS - 31

T2 - 248th Electrochemical Society Meeting

Y2 - 12 October 2025 through 16 October 2025

ER -