Application of electro mechanical stiffness modulation in biomimetic hair flow sensors

H. Droogendijk, C.M. Bruinink, Remco G.P. Sanders, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)


    We propose a new electromechanical interfacing scheme to improve the low-frequency response of energy buffering type transducers. The method is based on periodic modulation of the stiffness in the sensory system which allows to up-convert the signals of interest to frequencies where measurement is less troubled by noise or other detrimental effects. We demonstrate this principle by means of capacitive artificial hair flow sensors, where we modulate the rotational spring stiffness by periodic electrostatic spring softening (ESS), such that a replica of the original signal is formed around the modulation frequency. We show that using this replica we gain a substantial improvement of the low frequency signal-to-noise ratio and sensing threshold.
    Original languageUndefined
    Title of host publication25th IEEE International Conference on Micro Electro Mechanical Systems
    Place of PublicationUSA
    Number of pages4
    ISBN (Print)978-1-4673-0324-8
    Publication statusPublished - 2012
    Event25th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
    Duration: 29 Jan 20122 Feb 2012
    Conference number: 25

    Publication series

    PublisherIEEE Instrumentation & Measurement Society
    ISSN (Print)1084-6999


    Conference25th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2012
    Abbreviated titleMEMS


    • METIS-286339
    • EWI-21789
    • TST-Life like
    • IR-80252

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