Abstract
Al2O3 and KY(WO4)2 are promising materials for photonic applications with excellent optical properties and of interest for obtaining on chip resonator structures. However, there is no method available to fabricate these structures except FIB technology. We will discuss strategies to optimize the nano-structuring processes that are strongly dependent on the geometry of the desired structure. Furthermore, we will report our recent results on utilization and optimization of the focused ion beam technique for fabrication of nano-structures in integrated photonic devices on several material platforms such as amorphous Al2O3 and crystalline KY(WO4)2
Original language | Undefined |
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Title of host publication | Technical Proceedings of the 2011 NSTI Nanotechnology Conference & Expo - Nanotech 2011 |
Place of Publication | New York |
Publisher | CRC Press |
Pages | 200-203 |
Number of pages | 4 |
ISBN (Print) | 978-1-4398-7139-3 |
Publication status | Published - Jun 2011 |
Event | 2011 NSTI Nanotechnology Conference and Expo, Nanotech 2011 - Boston, United States Duration: 13 Jun 2011 → 16 Jun 2011 http://www.techconnectworld.com/Nanotech2011/ |
Publication series
Name | |
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Publisher | CRC Press |
Volume | 2 |
Conference
Conference | 2011 NSTI Nanotechnology Conference and Expo, Nanotech 2011 |
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Abbreviated title | Nanotech |
Country/Territory | United States |
City | Boston |
Period | 13/06/11 → 16/06/11 |
Internet address |
Keywords
- IR-77677
- METIS-279700
- Gratings
- EWI-20335
- Optical waveguides
- Photonics
- IOMS-APD: Active Photonic Devices
- Focused ion beam nanostructuring