Application of silicon oxynitride in telecommunication devices

Kerstin Worhoff, Paul Lambeck, R.M. de Ridder, A. Driessen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Keywords

@inproceedings{e52ff98d82dd46888f0ac3d598710eb3,

title = "Application of silicon oxynitride in telecommunication devices",

keywords = "METIS-130223",

author = "Kerstin Worhoff and Paul Lambeck and {de Ridder}, R.M. and A. Driessen",

year = "1997",

month = nov,

day = "26",

language = "Undefined",

isbn = "90-73461-13-8",

pages = "153--156",

booktitle = "LEOS symposium",

}