Application of silicon oxynitride in telecommunication devices

Kerstin Worhoff, Paul Lambeck, R.M. de Ridder, A. Driessen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationLEOS symposium
Place of Publicationbenelux
Pages153-156
Publication statusPublished - 26 Nov 1997

Keywords

  • METIS-130223

Cite this

Worhoff, K., Lambeck, P., de Ridder, R. M., & Driessen, A. (1997). Application of silicon oxynitride in telecommunication devices. In LEOS symposium (pp. 153-156). benelux.