Applications of a model for silicon resonant sensors

A. Prak, Albert Prak, J.H.J. Fluitman

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    Abstract

    A recently developed model for excitation and detection mechanisms of silicon resonant sensors is experimentally verified by applying it to practical devices. Various system aspects of resonators with piezoelectric and electrostatic excitation/detection come into focus. The experimental results agree reasonably well with simulation results obtained by the model.
    Original languageUndefined
    Pages (from-to)251-255
    Number of pages5
    JournalSensors and actuators. A: Physical
    Volume41-42
    Issue number41-42
    DOIs
    Publication statusPublished - 1 Apr 1994

    Keywords

    • METIS-111579
    • IR-14386
    • EWI-14104

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