Applications of a model for silicon resonant sensors

A. Prak; Albert Prak; J.H.J. Fluitman

doi:10.1016/0924-4247(94)80119-3

Applications of a model for silicon resonant sensors

A. Prak, Albert Prak, J.H.J. Fluitman

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Abstract

A recently developed model for excitation and detection mechanisms of silicon resonant sensors is experimentally verified by applying it to practical devices. Various system aspects of resonators with piezoelectric and electrostatic excitation/detection come into focus. The experimental results agree reasonably well with simulation results obtained by the model.

Original language	Undefined
Pages (from-to)	251-255
Number of pages	5
Journal	Sensors and actuators. A: Physical
Volume	41-42
Issue number	41-42
DOIs	https://doi.org/10.1016/0924-4247(94)80119-3
Publication status	Published - 1 Apr 1994

Keywords

METIS-111579
IR-14386
EWI-14104

Access to Document

10.1016/0924-4247(94)80119-3

Cite this

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title = "Applications of a model for silicon resonant sensors",

abstract = "A recently developed model for excitation and detection mechanisms of silicon resonant sensors is experimentally verified by applying it to practical devices. Various system aspects of resonators with piezoelectric and electrostatic excitation/detection come into focus. The experimental results agree reasonably well with simulation results obtained by the model.",

keywords = "METIS-111579, IR-14386, EWI-14104",

author = "A. Prak and Albert Prak and J.H.J. Fluitman",

year = "1994",

month = apr,

day = "1",

doi = "10.1016/0924-4247(94)80119-3",

language = "Undefined",

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pages = "251--255",

journal = "Sensors and actuators. A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

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T1 - Applications of a model for silicon resonant sensors

AU - Prak, A.

AU - Prak, Albert

AU - Fluitman, J.H.J.

PY - 1994/4/1

Y1 - 1994/4/1

N2 - A recently developed model for excitation and detection mechanisms of silicon resonant sensors is experimentally verified by applying it to practical devices. Various system aspects of resonators with piezoelectric and electrostatic excitation/detection come into focus. The experimental results agree reasonably well with simulation results obtained by the model.

AB - A recently developed model for excitation and detection mechanisms of silicon resonant sensors is experimentally verified by applying it to practical devices. Various system aspects of resonators with piezoelectric and electrostatic excitation/detection come into focus. The experimental results agree reasonably well with simulation results obtained by the model.

KW - METIS-111579

KW - IR-14386

KW - EWI-14104

U2 - 10.1016/0924-4247(94)80119-3

DO - 10.1016/0924-4247(94)80119-3

M3 - Article

VL - 41-42

SP - 251

EP - 255

JO - Sensors and actuators. A: Physical

JF - Sensors and actuators. A: Physical

SN - 0924-4247

IS - 41-42

ER -