Abstract
A recently developed model for excitation and detection mechanisms of silicon resonant sensors is experimentally verified by applying it to practical devices. Various system aspects of resonators with piezoelectric and electrostatic excitation/detection come into focus. The experimental results agree reasonably well with simulation results obtained by the model.
Original language | Undefined |
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Pages (from-to) | 251-255 |
Number of pages | 5 |
Journal | Sensors and actuators. A: Physical |
Volume | 41-42 |
Issue number | 41-42 |
DOIs | |
Publication status | Published - 1 Apr 1994 |
Keywords
- METIS-111579
- IR-14386
- EWI-14104