Several thin-film deposition and etching techniques of the polymer fluorocarbon are investigated and the resulting thin-film properties will be compared with those of commercially available bulk polytetrafluoroethylene. The most promising deposition technique is performed in a conventional reactive ion etcher using a carbonhydrotrifluoride (CHF3) plasma. By changing the deposition parameters, control of the properties and step coverage of the deposited thin films within a certain range is possible, e.g., unidirectional and conformal step coverage of deposited thin films can be obtained. Etching is performed with the help of an evaporated aluminum oxide mask.
Jansen, H. V., Gardeniers, J. G. E., Elders, J., Tilmans, H. A. C., & Elwenspoek, M. (1994). Applications of fluorocarbon polymers in micromechanics and micromachining. Sensors and actuators. A: Physical, 41(1-3), 136-140. https://doi.org/10.1016/0924-4247(94)80101-0