Applications of the microelectromechanical systems in nanoscience

S. Deladi, Edin Sarajlic, A.A. Kuijpers, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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    The miniaturization and development of complex Micro Electro Mechanical Systems (MEMS) led to a need for an increase in performance of such systems in terms of displacement range, accuracy, velocity etc. There is a huge potential of using them as tools in nanonoscience such as high-density probe memory applications, scanning probe microscopy (e.g. nanolithography, prototyping of nanostructures), bio-physical applications (e.g. cell stimulation and monitoring), chemistry (e.g. trapping molecules in nano-gaps for further analysis). Recent development of such MEMS devices in the Transducers Science and Technology group, as well as experimental testing in different nano-scale related applications are presented. The work focuses on bidirectional and 2DOF (two degrees of freedom) microactuator stages, nano-positioning systems, and development of atomic force microscopy based applications and characterization techniques.
    Original languageUndefined
    Title of host publicationProceedings of the II Eccomas Conference on Smart Structures and Materials
    Place of PublicationLissabon, Portugal
    PublisherInstituto de Engenharia Mecânica
    Number of pages15
    ISBN (Print)972-8688-42-3
    Publication statusPublished - 2005
    EventII ECCOMAS Thematic Conference on Smart Structures and Materials 2005 - Lissabon, Portugal
    Duration: 18 Jul 200521 Jul 2005


    ConferenceII ECCOMAS Thematic Conference on Smart Structures and Materials 2005


    • EWI-10281
    • Nanotechnology
    • actuator
    • METIS-228622
    • Sensor
    • IR-54439
    • AFM
    • MEMS

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