Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition

A.M.K. Dagamseh, C.M. Bruinink, Marcel Kolster, Remco J. Wiegerink, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)
    71 Downloads (Pure)


    Flow sensor arrays can be used to extract features from flow fields rather than averaging or providing local measurements provided the sensors in the array structure can be interrogated individually. This paper addresses the latest developments in fabrication and array interfacing of biomimetic artificial air-flow sensors. Hair flow sensors in wafer level arrays have been successfully fabricated using SOI wafers with deep trench isolation structures. Using a Frequency Division Multi¬plexing (FDM) technique, we were able to simultaneously measure flow signals at multiple sensor positions. By virtue of FDM, once signals are retrieved from all individual array elements, spatio-temporal flow patterns can be reconstructed, while few system interconnects are required.
    Original languageUndefined
    Title of host publicationDTIP2010 - Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS
    PublisherEDA Publshing
    Number of pages4
    ISBN (Print)978-2-35500-011-9
    Publication statusPublished - May 2010
    Event2010 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 - Seville, Spain
    Duration: 5 May 20107 May 2010

    Publication series

    PublisherEDA Publshing


    Conference2010 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
    Abbreviated titleDTIP


    • IR-71269
    • METIS-270694
    • TST-Life like
    • EWI-16407

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