Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition

A.M.K. Dagamseh, C.M. Bruinink, Marcel Kolster, Remco J. Wiegerink, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
24 Downloads (Pure)

Abstract

Flow sensor arrays can be used to extract features from flow fields rather than averaging or providing local measurements provided the sensors in the array structure can be interrogated individually. This paper addresses the latest developments in fabrication and array interfacing of biomimetic artificial air-flow sensors. Hair flow sensors in wafer level arrays have been successfully fabricated using SOI wafers with deep trench isolation structures. Using a Frequency Division Multi¬plexing (FDM) technique, we were able to simultaneously measure flow signals at multiple sensor positions. By virtue of FDM, once signals are retrieved from all individual array elements, spatio-temporal flow patterns can be reconstructed, while few system interconnects are required.
Original languageUndefined
Title of host publicationDTIP2010 - Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS
PublisherEDA Publshing
Pages48-51
Number of pages4
ISBN (Print)978-2-35500-011-9
Publication statusPublished - May 2010
Event2010 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 - Seville, Spain
Duration: 5 May 20107 May 2010

Publication series

Name
PublisherEDA Publshing

Conference

Conference2010 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Abbreviated titleDTIP
CountrySpain
CitySeville
Period5/05/107/05/10

Keywords

  • IR-71269
  • METIS-270694
  • TST-Life like
  • TST-SENSORS
  • EWI-16407

Cite this

Dagamseh, A. M. K., Bruinink, C. M., Kolster, M., Wiegerink, R. J., Lammerink, T. S. J., & Krijnen, G. J. M. (2010). Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition. In DTIP2010 - Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (pp. 48-51). EDA Publshing.
Dagamseh, A.M.K. ; Bruinink, C.M. ; Kolster, Marcel ; Wiegerink, Remco J. ; Lammerink, Theodorus S.J. ; Krijnen, Gijsbertus J.M. / Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition. DTIP2010 - Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS. EDA Publshing, 2010. pp. 48-51
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title = "Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition",
abstract = "Flow sensor arrays can be used to extract features from flow fields rather than averaging or providing local measurements provided the sensors in the array structure can be interrogated individually. This paper addresses the latest developments in fabrication and array interfacing of biomimetic artificial air-flow sensors. Hair flow sensors in wafer level arrays have been successfully fabricated using SOI wafers with deep trench isolation structures. Using a Frequency Division Multi¬plexing (FDM) technique, we were able to simultaneously measure flow signals at multiple sensor positions. By virtue of FDM, once signals are retrieved from all individual array elements, spatio-temporal flow patterns can be reconstructed, while few system interconnects are required.",
keywords = "IR-71269, METIS-270694, TST-Life like, TST-SENSORS, EWI-16407",
author = "A.M.K. Dagamseh and C.M. Bruinink and Marcel Kolster and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Krijnen, {Gijsbertus J.M.}",
year = "2010",
month = "5",
language = "Undefined",
isbn = "978-2-35500-011-9",
publisher = "EDA Publshing",
pages = "48--51",
booktitle = "DTIP2010 - Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS",

}

Dagamseh, AMK, Bruinink, CM, Kolster, M, Wiegerink, RJ, Lammerink, TSJ & Krijnen, GJM 2010, Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition. in DTIP2010 - Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS. EDA Publshing, pp. 48-51, 2010 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010, Seville, Spain, 5/05/10.

Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition. / Dagamseh, A.M.K.; Bruinink, C.M.; Kolster, Marcel; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Krijnen, Gijsbertus J.M.

DTIP2010 - Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS. EDA Publshing, 2010. p. 48-51.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition

AU - Dagamseh, A.M.K.

AU - Bruinink, C.M.

AU - Kolster, Marcel

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Krijnen, Gijsbertus J.M.

PY - 2010/5

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N2 - Flow sensor arrays can be used to extract features from flow fields rather than averaging or providing local measurements provided the sensors in the array structure can be interrogated individually. This paper addresses the latest developments in fabrication and array interfacing of biomimetic artificial air-flow sensors. Hair flow sensors in wafer level arrays have been successfully fabricated using SOI wafers with deep trench isolation structures. Using a Frequency Division Multi¬plexing (FDM) technique, we were able to simultaneously measure flow signals at multiple sensor positions. By virtue of FDM, once signals are retrieved from all individual array elements, spatio-temporal flow patterns can be reconstructed, while few system interconnects are required.

AB - Flow sensor arrays can be used to extract features from flow fields rather than averaging or providing local measurements provided the sensors in the array structure can be interrogated individually. This paper addresses the latest developments in fabrication and array interfacing of biomimetic artificial air-flow sensors. Hair flow sensors in wafer level arrays have been successfully fabricated using SOI wafers with deep trench isolation structures. Using a Frequency Division Multi¬plexing (FDM) technique, we were able to simultaneously measure flow signals at multiple sensor positions. By virtue of FDM, once signals are retrieved from all individual array elements, spatio-temporal flow patterns can be reconstructed, while few system interconnects are required.

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Dagamseh AMK, Bruinink CM, Kolster M, Wiegerink RJ, Lammerink TSJ, Krijnen GJM. Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition. In DTIP2010 - Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS. EDA Publshing. 2010. p. 48-51