Arrays of cricket-inspired sensory hairs with capacitive motion detection

J.J.J. van Baar, Marcel Dijkstra, Remco J. Wiegerink, Theodorus S.J. Lammerink, J.H. de Boer, R. de Boer, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    28 Citations (Scopus)
    64 Downloads (Pure)

    Abstract

    This paper presents the fabrication of flow-sensors based on the drag-force induced motion of artificial hairs connected to capacitive read-out. Artificial hairs were made either out of moulded silicon-nitride structures or by SU-8. The SU-8 hairs were suspended on membranes containing electrodes to form the variable capacitors. Silicon-rich-nitride hairs were made using a silicon wafer as a dissolvable mould. The longest SU-8 hairs were fabricated using a 470 /spl mu/m thick photoresist layer. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been carried out on entire arrays and are reported in this paper.
    Original languageUndefined
    Title of host publicationProceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems
    Place of PublicationLos Alamitos
    PublisherIEEE Computer Society
    Pages646-649
    Number of pages4
    ISBN (Print)0-7803-8732-5
    DOIs
    Publication statusPublished - 2005
    Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 - Fontainebleau Hilton Resort, Miami Beach, United States
    Duration: 30 Jan 20053 Feb 2005
    Conference number: 18

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005
    Abbreviated titleMEMS
    CountryUnited States
    CityMiami Beach
    Period30/01/053/02/05

    Keywords

    • TST-Life like
    • IR-54397
    • METIS-228531
    • EWI-9912

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