Arrays of cricket-inspired sensory hairs with capacitive motion detection

J.J.J. van Baar; Marcel Dijkstra; Remco J. Wiegerink; Theodorus S.J. Lammerink; J.H. de Boer; R. de Boer; Gijsbertus J.M. Krijnen

doi:10.1109/MEMSYS.2005.1454012

Arrays of cricket-inspired sensory hairs with capacitive motion detection

J.J.J. van Baar, Marcel Dijkstra, Remco J. Wiegerink, Theodorus S.J. Lammerink, J.H. de Boer, R. de Boer, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

32 Citations (Scopus)

161 Downloads (Pure)

Abstract

This paper presents the fabrication of flow-sensors based on the drag-force induced motion of artificial hairs connected to capacitive read-out. Artificial hairs were made either out of moulded silicon-nitride structures or by SU-8. The SU-8 hairs were suspended on membranes containing electrodes to form the variable capacitors. Silicon-rich-nitride hairs were made using a silicon wafer as a dissolvable mould. The longest SU-8 hairs were fabricated using a 470 /spl mu/m thick photoresist layer. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been carried out on entire arrays and are reported in this paper.

Original language	Undefined
Title of host publication	Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems
Place of Publication	Los Alamitos
Publisher	IEEE
Pages	646-649
Number of pages	4
ISBN (Print)	0-7803-8732-5
DOIs	https://doi.org/10.1109/MEMSYS.2005.1454012
Publication status	Published - 2005
Event	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 - Fontainebleau Hilton Resort, Miami Beach, United States Duration: 30 Jan 2005 → 3 Feb 2005 Conference number: 18

Publication series

Name
Publisher	IEEE

Conference

Conference	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005
Abbreviated title	MEMS
Country/Territory	United States
City	Miami Beach
Period	30/01/05 → 3/02/05

Keywords

TST-Life like
IR-54397
METIS-228531
EWI-9912

Access to Document

10.1109/MEMSYS.2005.1454012

Cite this

@inproceedings{9e2dc591582e4db9b1ea8ac7be8aef84,

title = "Arrays of cricket-inspired sensory hairs with capacitive motion detection",

abstract = "This paper presents the fabrication of flow-sensors based on the drag-force induced motion of artificial hairs connected to capacitive read-out. Artificial hairs were made either out of moulded silicon-nitride structures or by SU-8. The SU-8 hairs were suspended on membranes containing electrodes to form the variable capacitors. Silicon-rich-nitride hairs were made using a silicon wafer as a dissolvable mould. The longest SU-8 hairs were fabricated using a 470 /spl mu/m thick photoresist layer. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been carried out on entire arrays and are reported in this paper.",

keywords = "TST-Life like, IR-54397, METIS-228531, EWI-9912",

author = "{van Baar}, J.J.J. and Marcel Dijkstra and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and {de Boer}, J.H. and {de Boer}, R. and Krijnen, {Gijsbertus J.M.}",

year = "2005",

doi = "10.1109/MEMSYS.2005.1454012",

language = "Undefined",

isbn = "0-7803-8732-5",

publisher = "IEEE",

pages = "646--649",

booktitle = "Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems",

address = "United States",

note = "18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 ; Conference date: 30-01-2005 Through 03-02-2005",

}

van Baar, JJJ, Dijkstra, M, Wiegerink, RJ, Lammerink, TSJ, de Boer, JH, de Boer, R & Krijnen, GJM 2005, Arrays of cricket-inspired sensory hairs with capacitive motion detection. in Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems. IEEE, Los Alamitos, pp. 646-649, 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005, Miami Beach, Florida, United States, 30/01/05. https://doi.org/10.1109/MEMSYS.2005.1454012

Arrays of cricket-inspired sensory hairs with capacitive motion detection. / van Baar, J.J.J.; Dijkstra, Marcel; Wiegerink, Remco J. et al.
Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems. Los Alamitos: IEEE, 2005. p. 646-649.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Arrays of cricket-inspired sensory hairs with capacitive motion detection

AU - van Baar, J.J.J.

AU - Dijkstra, Marcel

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - de Boer, J.H.

AU - de Boer, R.

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 18

PY - 2005

Y1 - 2005

N2 - This paper presents the fabrication of flow-sensors based on the drag-force induced motion of artificial hairs connected to capacitive read-out. Artificial hairs were made either out of moulded silicon-nitride structures or by SU-8. The SU-8 hairs were suspended on membranes containing electrodes to form the variable capacitors. Silicon-rich-nitride hairs were made using a silicon wafer as a dissolvable mould. The longest SU-8 hairs were fabricated using a 470 /spl mu/m thick photoresist layer. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been carried out on entire arrays and are reported in this paper.

AB - This paper presents the fabrication of flow-sensors based on the drag-force induced motion of artificial hairs connected to capacitive read-out. Artificial hairs were made either out of moulded silicon-nitride structures or by SU-8. The SU-8 hairs were suspended on membranes containing electrodes to form the variable capacitors. Silicon-rich-nitride hairs were made using a silicon wafer as a dissolvable mould. The longest SU-8 hairs were fabricated using a 470 /spl mu/m thick photoresist layer. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been carried out on entire arrays and are reported in this paper.

KW - TST-Life like

KW - IR-54397

KW - METIS-228531

KW - EWI-9912

U2 - 10.1109/MEMSYS.2005.1454012

DO - 10.1109/MEMSYS.2005.1454012

M3 - Conference contribution

SN - 0-7803-8732-5

SP - 646

EP - 649

BT - Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems

PB - IEEE

CY - Los Alamitos

T2 - 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005

Y2 - 30 January 2005 through 3 February 2005

ER -