Arsenic-doped high-resistivity-silicon epitaxial layers for integrating low-capacitance diodes

Agata Sakic*, Tom L.M. Scholtes, Wiebe De Boer, Negin Golshani, Jaber Derakhshandeh, Lis K. Nanver

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

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