Abstract
This paper presents the modelling, design, fabrication and characterization of flow sensors based on the wind-receptor hairs of crickets. Cricket sensory hairs are highly sensitive to drag-forces exerted on the hair shaft. Artificial sensory hairs have been realized in SU-8 on suspended SixNy membranes. The movement of the membranes is detected capacitively. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept.
Original language | Undefined |
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Pages (from-to) | S132-S138 |
Number of pages | 8 |
Journal | Journal of micromechanics and microengineering |
Volume | 15 |
Issue number | 7 |
DOIs | |
Publication status | Published - 7 Jul 2005 |
Keywords
- EWI-9798
- IR-58774
- METIS-228589
- TST-Life like