Artificial sensory hairs based on the flow sensitive receptor hairs of crickets

Marcel Dijkstra; J.J.J. van Baar; Remco J. Wiegerink; Theodorus S.J. Lammerink; J.H. de Boer; Gijsbertus J.M. Krijnen

doi:10.1088/0960-1317/15/7/019

Artificial sensory hairs based on the flow sensitive receptor hairs of crickets

Marcel Dijkstra, J.J.J. van Baar, Remco J. Wiegerink, Theodorus S.J. Lammerink, J.H. de Boer, Gijsbertus J.M. Krijnen

Research output: Contribution to journal › Article › Academic › peer-review

119 Citations (Scopus)

72 Downloads (Pure)

Abstract

This paper presents the modelling, design, fabrication and characterization of flow sensors based on the wind-receptor hairs of crickets. Cricket sensory hairs are highly sensitive to drag-forces exerted on the hair shaft. Artificial sensory hairs have been realized in SU-8 on suspended SixNy membranes. The movement of the membranes is detected capacitively. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept.

Original language	Undefined
Pages (from-to)	S132-S138
Number of pages	8
Journal	Journal of micromechanics and microengineering
Volume	15
Issue number	7
DOIs	https://doi.org/10.1088/0960-1317/15/7/019
Publication status	Published - 7 Jul 2005

Keywords

EWI-9798
IR-58774
METIS-228589
TST-Life like

Access to Document

10.1088/0960-1317/15/7/019

Artificial_sensory_hairs_based_on_the_flow_-_Dijkstra
open

Cite this

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title = "Artificial sensory hairs based on the flow sensitive receptor hairs of crickets",

abstract = "This paper presents the modelling, design, fabrication and characterization of flow sensors based on the wind-receptor hairs of crickets. Cricket sensory hairs are highly sensitive to drag-forces exerted on the hair shaft. Artificial sensory hairs have been realized in SU-8 on suspended SixNy membranes. The movement of the membranes is detected capacitively. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept.",

keywords = "EWI-9798, IR-58774, METIS-228589, TST-Life like",

author = "Marcel Dijkstra and {van Baar}, J.J.J. and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and {de Boer}, J.H. and Krijnen, {Gijsbertus J.M.}",

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Artificial sensory hairs based on the flow sensitive receptor hairs of crickets. / Dijkstra, Marcel; van Baar, J.J.J.; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; de Boer, J.H.; Krijnen, Gijsbertus J.M.

In: Journal of micromechanics and microengineering, Vol. 15, No. 7, 07.07.2005, p. S132-S138.

Research output: Contribution to journal › Article › Academic › peer-review

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AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - de Boer, J.H.

AU - Krijnen, Gijsbertus J.M.

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N2 - This paper presents the modelling, design, fabrication and characterization of flow sensors based on the wind-receptor hairs of crickets. Cricket sensory hairs are highly sensitive to drag-forces exerted on the hair shaft. Artificial sensory hairs have been realized in SU-8 on suspended SixNy membranes. The movement of the membranes is detected capacitively. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept.

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KW - IR-58774

KW - METIS-228589

KW - TST-Life like

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