Atmospheric pressure dc glow discharge on a microchip and its application as a molecular emission detector

Jan C.T. Eijkel, Herbert Stoeri, Andreas Manz*

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

82 Citations (Scopus)

Abstract

Scaling theory for direct current glow discharges predicts that normal discharges can exist at atmospheric pressure in microscale discharge tubes. The validity of this theory is demonstrated by the creation of an atmospheric helium plasma in a nanoliter-size discharge chamber on a microchip. It is shown that the microchip plasma can be successfully applied for molecular emission detection. It exhibits a low detection (10-14 g s-1) limit for methane with a calibration curve that is linear over two decades. Simple instrumentation, small detector size and good sensitivity make the device highly suitable for integration in micro-analysis systems.

Original languageEnglish
Pages (from-to)297-300
Number of pages4
JournalJournal of analytical atomic spectrometry
Volume15
Issue number3
DOIs
Publication statusPublished - 1 Jan 2000
Externally publishedYes

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