Atomic layer deposition of SiO2-GeO2multilayers

Jordi Antoja-Lleonart*, Silang Zhou, Kit de Hond, Sizhao Huang, Gertjan Koster, Guus Rijnders, Beatriz Noheda*

*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

10 Citations (Scopus)
210 Downloads (Pure)

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Physics

Material Science