Atomic layer deposition - system with in-situ characterization of layer-by-layer growth

R.G. Bankras, Antonius A.I. Aarnink, J. Holleman, Jurriaan Schmitz

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 2 Oct 2003
    EventMESA+ Day 2003 - University of Twente, Enschede, Netherlands
    Duration: 2 Oct 20032 Oct 2003

    Conference

    ConferenceMESA+ Day 2003
    CountryNetherlands
    CityEnschede
    Period2/10/032/10/03
    Other(MESA+ Meeting/Dag)

    Keywords

    • METIS-213249

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