@inproceedings{4ae8405a2c924b82a39c4a51a5ea8ad8,
title = "Automated Contacting of On-Wafer Devices for RF Testing",
abstract = "A method is presented for automated probing of on-wafer devices for measurements at millimetre-wave frequencies. The proposed method automatically detects the contact between the measurement probe and on-wafer device, based on the evaluation of variation in the input reflection coefficient. It is shown that, using this automated technique, about five times better measurement repeatability is achieved in millimetre-wave device characterisation.",
keywords = "Measurement techniques, Measurement uncertainty, Microwave measurements, On-wafer contacting, On-wafer probing, Precision measurements, Uncertainty, n/a OA procedure",
author = "F. Mubarak and C.D. Martino and R. Toskovic and G. Rietveld and M. Spirito",
note = "Funding Information: ACKNOWLEDGMENT This work is part of the TEMMT (18SIB09) project that has received funding from the EMPIR programme co-financed by the Participating States and the European Union{\textquoteright}s Horizon 2020 research and innovation programme. Additional funding was received from the Dutch Ministry of Economic Affairs and Climate. Publisher Copyright: {\textcopyright} 2020 IEEE.; Conference on Precision Electromagnetic Measurements, CPEM 2020, CPEM 2020 ; Conference date: 24-08-2020 Through 28-08-2020",
year = "2020",
month = aug,
doi = "10.1109/CPEM49742.2020.9191800",
language = "English",
isbn = "978-1-7281-5899-0",
series = "Conference on Precision Electromagnetic Measurements (CPEM)",
publisher = "IEEE",
booktitle = "2020 Conference on Precision Electromagnetic Measurements, CPEM 2020",
address = "United States",
}