@conference{86df13337ecd4697a33d327ebaf9b1d4,
title = "B4C/Si based EUV multilayer mirror with suppressed reflectivity for CO2 laser radiation",
keywords = "METIS-277889",
author = "Viacheslav Medvedev and Andrey Yakshin and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and V.M. Krivtsun and S.N. Yakunin and Frederik Bijkerk",
year = "2011",
month = jun,
day = "13",
language = "English",
pages = "--",
note = "2011 International Workshop on EUV Lithography ; Conference date: 13-06-2011 Through 17-06-2011",
}