Back-end-of-line CMOS-compatible diode fabrication with pure boron deposition down to 50 °C

Tihomir Knežević*, Tomislav Suligoj, Xingyu Liu, Lis K. Nanver, Ahmed Elsayed, Jan F. Dick, Joerg Schulze

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    2 Citations (Scopus)
    15 Downloads (Pure)

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    Material Science