Base driven micromechanical resonators

S. Bouwstra, H.A.C. Tilmans, A. Selvakumar, K. Najafi

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    2 Citations (Scopus)
    Original languageUndefined
    Title of host publicationIEEE Solid-State Sensor and Actuator Workshop
    Place of PublicationHilton Head Island, South Carolina, USA
    Number of pages5
    Publication statusPublished - 22 Jun 1992


    • METIS-114044

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