Base driven micromechanical resonators

S. Bouwstra, H.A.C. Tilmans, A. Selvakumar, K. Najafi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	IEEE Solid-State Sensor and Actuator Workshop
Place of Publication	Hilton Head Island, South Carolina, USA
Pages	148-152
Number of pages	5
Publication status	Published - 22 Jun 1992

Keywords

@inproceedings{b536a10513d54dc6ac57532cc6b411f8,

title = "Base driven micromechanical resonators",

keywords = "METIS-114044",

author = "S. Bouwstra and H.A.C. Tilmans and A. Selvakumar and K. Najafi",

year = "1992",

month = jun,

day = "22",

language = "Undefined",

pages = "148--152",

booktitle = "IEEE Solid-State Sensor and Actuator Workshop",

}