Abstract
A general platform for integrated opto-electronic sensor systems on silicon is proposed. The system is based on a hybridly integrated semiconductor laser, ZnO optical waveguides and monolithic photodiodes and electronic circuiry.
Original language | English |
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Title of host publication | Sensor Technology 1994 |
Subtitle of host publication | proceedings of the Dutch Conference on Sensor Technology 1994 |
Editors | Paul Lambeck |
Place of Publication | Enschede |
Publisher | University of Twente |
Pages | 189-193 |
Number of pages | 5 |
Publication status | Published - 17 Feb 1994 |
Event | Dutch Conference on Sensor Technology 1994 - University of Twente, Enschede, Netherlands Duration: 17 Feb 1994 → 18 Feb 1994 |
Conference
Conference | Dutch Conference on Sensor Technology 1994 |
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Country/Territory | Netherlands |
City | Enschede |
Period | 17/02/94 → 18/02/94 |