Basic technologies and functions; microsystem technology and silicon micromachining

J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationMicrosystem Technology: exploring opportunities
    Place of PublicationDen Haag
    PublisherStichting Toekomstbeeld der Techniek
    Pages35-40
    ISBN (Print)90-14-05088-7
    Publication statusPublished - 10 Jan 1994

    Keywords

    • METIS-114080

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