Basic technologies and functions; microsystem technology and silicon micromachining

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Microsystem Technology: exploring opportunities
Place of Publication	Den Haag
Publisher	Stichting Toekomstbeeld der Techniek
Pages	35-40
ISBN (Print)	90-14-05088-7
Publication status	Published - 10 Jan 1994

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This output contributes to the following UN Sustainable Development Goals (SDGs)

@inproceedings{fbfd5a89dbf24037b7ccece00c8ea7ea,

title = "Basic technologies and functions; microsystem technology and silicon micromachining",

keywords = "METIS-114080",

author = "J.H.J. Fluitman",

year = "1994",

month = jan,

day = "10",

language = "Undefined",

isbn = "90-14-05088-7",

pages = "35--40",

booktitle = "Microsystem Technology: exploring opportunities",

publisher = "Stichting Toekomstbeeld der Techniek",

}