BaxSr1-xTi1.02O3 metal-insulator-metal capacitors on planarized alumina substrates

M.P.J. Tiggelman, K. Reimann, M. Klee, R. Mauczok, W. Keur, Raymond Josephus Engelbart Hueting

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    4 Citations (Scopus)


    Nanocrystalline barium strontium titanate (BaxSr1−xTi1.02O3) thin films with a barium content of x=0.8, 0.9 and 1 have been fabricated in a metal–insulator–metal configuration on glass-planarized alumina substrates. Cost-effective processing measures have been utilized by using poly-crystalline alumina substrates, wetchemical processing of the dielectric, and by a small physical area of the ferroelectric capacitors (as low as 50 μm2 for radio frequencies measurements). Glass-planarization on alumina ceramic substrates enables barium strontium titanate films with high quality and homogeneity. We mainly focus on fine-tuning the electrical performance in the low gigahertz range (<10 GHz). Extensive micro-structural and electrical characterization has been performed. Micro-structural information is obtained by: Transmission Electron Microscopy, Scanning Electron Microscopy and X-ray diffraction. The dielectric response is investigated as a function of temperature, frequency and electric field for each sample. We measured a relatively constant permittivity for typical operating temperatures of applications. The quality factor Q is between 21 and 27 at 1 GHz at zero DC bias and the tuning ratio η between 1.8 and 2.2 at |E|=0.4 MV/cm.
    Original languageEnglish
    Pages (from-to)2854-2959
    Number of pages106
    JournalThin solid films
    Issue number10
    Publication statusPublished - 1 Mar 2010


    • EWI-17504
    • IR-70015
    • METIS-275567
    • SC-CICC: Characterization of IC Components


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