Batch fabrication of scanning microscopy probes for thermal and magnetic imaging using standard micromachining

Edin Sarajlic, Rolf Vermeer, M.Y. Delalande, Martin Herman Siekman, R. Huijink, H. Fujita, Leon Abelmann

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    We present a process for batch fabrication of a novel scanning microscopy probe for thermal and magnetic imaging using standard micromachining and conventional optical contact lithography. The probe features an AFM-type cantilever with a sharp pyramidal tip composed of four freestanding silicon nitride nanowires coated by conductive material. The nanowires form an electrical cross junction at the apex of the tip, addressable through the electrodes integrated on the cantilever. The cross junction on the tip apex can be utilized to produce heat and detect local temperature changes or to serve as a miniaturized Hall magnetometer enabling, in principle, thermal and magnetic imaging by scanning the probe tip over a surface. We have successfully fabricated a first probe prototype with a nanowire tip composed of 140 nm thick and 11 μ m long silicon nitride wires metallized by 6 nm titan and 30 nm gold layers. We have experimentally characterized electrical and thermal properties of the probe demonstrating its proper functioning. ©2010 IEEE.
    Original languageUndefined
    Title of host publication2010 IEEE 23rd International Conference on Micro Electro Mechanical Systemes, MEMS 2010
    Place of PublicationUSA
    PublisherIEEE Magnetics Society
    Number of pages4
    ISBN (Print)978-1-4244-5761-8
    Publication statusPublished - 2010
    Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Wanchai, Hong Kong, Hong Kong
    Duration: 24 Jan 201028 Jan 2010
    Conference number: 23

    Publication series

    PublisherIEEE Magnetics Society
    ISSN (Print)1084-6999


    Conference23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
    Abbreviated titleMEMS
    CountryHong Kong
    CityHong Kong


    • METIS-271106
    • TST-uSPAM: micro Scanning Probe Array Memory
    • Biosensors
    • Chemical sensors
    • IR-74287
    • RF MEMS resonators
    • MEMS fabrication
    • Energy harvesting
    • EWI-18714
    • physical sensors
    • microfluidic components
    • medical sensors
    • power MEMS
    • optical MEMS
    • electronics packaging
    • nanodevices
    • nanomaterials
    • TST-SMI: Formerly in EWI-SMI
    • Actuators

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