Batch furnace CVD of pure boron layers on Si and GaN substrates for lowleakage- current diode fabrication
- Thi Thanh Huong Vu
- , Kevin M. Batenburg
- , Antonius A.I. Aarnink
- , Tihomir Knežević
- , Xingyu Liu
- , Lis K. Nanver*
*Corresponding author for this work
Research output: Contribution to journal › Article › Academic › peer-review
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