Beam divergency studies on a long pulse XeCl excimer laser

R.M. Hofstra; F.A. van Goor; W.J. Witteman

doi:10.1117/12.248608

Beam divergency studies on a long pulse XeCl excimer laser

R.M. Hofstra
, F.A. van Goor
, W.J. Witteman

Laser Physics & Nonlinear Optics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

The focusability of a long pulse XeCl excimer laser has been improved using confocal positive branch unstable resonators where the outcoupling is done through the convex mirror. For the outcoupler different reflectivity profiles are used. A near diffraction limited output beam is obtained from hard edge unstable resonators. A beam with only one central spot in the focus of a lens can be obtained with a resonator fitted with a Gaussian outcoupling mirror.

Original language	English
Title of host publication	Optical Resonators
Subtitle of host publication	science and engineering
Editors	Tommaso Letardi, Horst Weber
Place of Publication	Bellingham, WA
Publisher	Kluwer Academic
Number of pages	11
ISBN (Print)	0-8194-2174-X
DOIs	https://doi.org/10.1117/12.248608
Publication status	Published - 10 Jul 1998
Event	Lasers, Optics and Vision for Productivity in Manufacturing I 1996 - Besancon, France Duration: 10 Jun 1996 → 14 Jun 1996

Publication series

Name	SPIE proceedings series
Publisher	SPIE
Volume	2788

Conference

Conference	Lasers, Optics and Vision for Productivity in Manufacturing I 1996
Country/Territory	France
City	Besancon
Period	10/06/96 → 14/06/96

Access to Document

10.1117/12.248608

1 Conference contribution

Beam divergency studies on a long pulse XeCl excimer laser
Hofstra, R. M., van Goor, F. A. & Witteman, W. J., 1998, Optical resonators: science and engineering. Kossowsky, R., Jilinek, M. & Novak, J. (eds.). Dordrecht: Kluwer, p. 253-266 (NATO ASI series. Partnership sub-series 3, High technology; vol. 45).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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title = "Beam divergency studies on a long pulse XeCl excimer laser",

abstract = "The focusability of a long pulse XeCl excimer laser has been improved using confocal positive branch unstable resonators where the outcoupling is done through the convex mirror. For the outcoupler different reflectivity profiles are used. A near diffraction limited output beam is obtained from hard edge unstable resonators. A beam with only one central spot in the focus of a lens can be obtained with a resonator fitted with a Gaussian outcoupling mirror.",

author = "R.M. Hofstra and \{van Goor\}, F.A. and W.J. Witteman",

year = "1998",

month = jul,

day = "10",

doi = "10.1117/12.248608",

language = "English",

isbn = "0-8194-2174-X",

series = "SPIE proceedings series",

publisher = "Kluwer Academic",

editor = "Tommaso Letardi and Horst Weber",

booktitle = "Optical Resonators",

note = "Lasers, Optics and Vision for Productivity in Manufacturing I 1996 ; Conference date: 10-06-1996 Through 14-06-1996",

}

Hofstra, RM, van Goor, FA & Witteman, WJ 1998, Beam divergency studies on a long pulse XeCl excimer laser. in T Letardi & H Weber (eds), Optical Resonators: science and engineering. SPIE proceedings series, vol. 2788, Kluwer Academic, Bellingham, WA, Lasers, Optics and Vision for Productivity in Manufacturing I 1996, Besancon, France, 10/06/96. https://doi.org/10.1117/12.248608

Beam divergency studies on a long pulse XeCl excimer laser. / Hofstra, R.M.; van Goor, F.A.; Witteman, W.J.
Optical Resonators: science and engineering. ed. / Tommaso Letardi; Horst Weber. Bellingham, WA: Kluwer Academic, 1998. (SPIE proceedings series; Vol. 2788).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Beam divergency studies on a long pulse XeCl excimer laser

AU - Hofstra, R.M.

AU - van Goor, F.A.

AU - Witteman, W.J.

PY - 1998/7/10

Y1 - 1998/7/10

N2 - The focusability of a long pulse XeCl excimer laser has been improved using confocal positive branch unstable resonators where the outcoupling is done through the convex mirror. For the outcoupler different reflectivity profiles are used. A near diffraction limited output beam is obtained from hard edge unstable resonators. A beam with only one central spot in the focus of a lens can be obtained with a resonator fitted with a Gaussian outcoupling mirror.

AB - The focusability of a long pulse XeCl excimer laser has been improved using confocal positive branch unstable resonators where the outcoupling is done through the convex mirror. For the outcoupler different reflectivity profiles are used. A near diffraction limited output beam is obtained from hard edge unstable resonators. A beam with only one central spot in the focus of a lens can be obtained with a resonator fitted with a Gaussian outcoupling mirror.

U2 - 10.1117/12.248608

DO - 10.1117/12.248608

M3 - Conference contribution

SN - 0-8194-2174-X

T3 - SPIE proceedings series

BT - Optical Resonators

A2 - Letardi, Tommaso

A2 - Weber, Horst

PB - Kluwer Academic

CY - Bellingham, WA

T2 - Lasers, Optics and Vision for Productivity in Manufacturing I 1996

Y2 - 10 June 1996 through 14 June 1996

ER -

Beam divergency studies on a long pulse XeCl excimer laser

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Beam divergency studies on a long pulse XeCl excimer laser

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