Bi-directional fast flow sensor with a large dynamic range

H.E. de Bree, Henricus V. Jansen, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

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    29 Citations (Scopus)


    In this article an extended mass-flow sensor is presented. Apart from the magnitude of the flow, as an add-on to the traditional anemometer, this sensor also measures the direction of the flow. This is of interest for the flow sensor market in general, and more in particular for the safety monitoring of low over-pressure systems like surgeries and cleanrooms where the risk of reverse flow needs to be avoided at all times. It detects the smallest amount of gas-flow, down to approximately 100 µm s-1 airflow up to high flow levels of 1 m s-1. The response time is of the order of milliseconds.
    Original languageUndefined
    Pages (from-to)186-189
    Number of pages4
    JournalJournal of micromechanics and microengineering
    Issue number2
    Publication statusPublished - Jun 1999


    • METIS-111686
    • IR-14588
    • EWI-13219

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