Bi-directional fast flow sensor with a large dynamic range

H.E. de Bree; Henricus V. Jansen; Theodorus S.J. Lammerink; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek

doi:10.1088/0960-1317/9/2/320

Bi-directional fast flow sensor with a large dynamic range

H.E. de Bree, Henricus V. Jansen, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

29 Citations (Scopus)

Abstract

In this article an extended mass-flow sensor is presented. Apart from the magnitude of the flow, as an add-on to the traditional anemometer, this sensor also measures the direction of the flow. This is of interest for the flow sensor market in general, and more in particular for the safety monitoring of low over-pressure systems like surgeries and cleanrooms where the risk of reverse flow needs to be avoided at all times. It detects the smallest amount of gas-flow, down to approximately 100 µm s-1 airflow up to high flow levels of 1 m s-1. The response time is of the order of milliseconds.

Original language	Undefined
Pages (from-to)	186-189
Number of pages	4
Journal	Journal of micromechanics and microengineering
Volume	9
Issue number	2
DOIs	https://doi.org/10.1088/0960-1317/9/2/320
Publication status	Published - Jun 1999

Keywords

METIS-111686
IR-14588
EWI-13219

Access to Document

10.1088/0960-1317/9/2/320

Cite this

de Bree, H. E., Jansen, H. V., Lammerink, T. S. J., Krijnen, G. J. M., & Elwenspoek, M. C. (1999). Bi-directional fast flow sensor with a large dynamic range. Journal of micromechanics and microengineering, 9(2), 186-189. https://doi.org/10.1088/0960-1317/9/2/320

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AU - Jansen, Henricus V.

AU - Lammerink, Theodorus S.J.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

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