Bi-directional fast flow sensor with a large dynamic range

Hans-Elias de Bree, Henri V. Jansen, Theo S.J. Lammerink, Gijs J.M. Krijnen, Miko Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    30 Citations (Scopus)

    Abstract

    In this article an extended mass-flow sensor is presented. Apart from the magnitude of the flow, as an add-on to the traditional anemometer, this sensor also measures the direction of the flow. This is of interest for the flow sensor market in general, and more in particular for the safety monitoring of low over-pressure systems like surgeries and cleanrooms where the risk of reverse flow needs to be avoided at all times. It detects the smallest amount of gas-flow, down to approximately 100 µm s-1 airflow up to high flow levels of 1 m s-1. The response time is of the order of milliseconds.
    Original languageEnglish
    Pages (from-to)186-189
    Number of pages4
    JournalJournal of micromechanics and microengineering
    Volume9
    Issue number2
    DOIs
    Publication statusPublished - Jun 1999

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