Bi-directional fast flow sensor with a large dynamic range

Hans-Elias  de Bree; Henri V. Jansen; Theo S.J. Lammerink; Gijs J.M. Krijnen; Miko Elwenspoek

doi:10.1088/0960-1317/9/2/320

Bi-directional fast flow sensor with a large dynamic range

Hans-Elias de Bree, Henri V. Jansen, Theo S.J. Lammerink, Gijs J.M. Krijnen, Miko Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

33 Citations (Scopus)

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Abstract

In this article an extended mass-flow sensor is presented. Apart from the magnitude of the flow, as an add-on to the traditional anemometer, this sensor also measures the direction of the flow. This is of interest for the flow sensor market in general, and more in particular for the safety monitoring of low over-pressure systems like surgeries and cleanrooms where the risk of reverse flow needs to be avoided at all times. It detects the smallest amount of gas-flow, down to approximately 100 µm s-1 airflow up to high flow levels of 1 m s-1. The response time is of the order of milliseconds.

Original language	English
Pages (from-to)	186-189
Number of pages	4
Journal	Journal of micromechanics and microengineering
Volume	9
Issue number	2
DOIs	https://doi.org/10.1088/0960-1317/9/2/320
Publication status	Published - Jun 1999

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10.1088/0960-1317/9/2/320

33 Citations
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Bi-directional fast flow sensor with a large dynamic range
de Bree, H.-E., Jansen, H. V., Lammerink, T. S. J., Krijnen, G. J. M. & Elwenspoek, M., 3 Jun 1998, MME '98: 9th Micromechanics Europe Workshop 1998, Proceedings. Oslo: SINTEF, p. 194-197 4 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Elwenspoek, Miko

PY - 1999/6

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DO - 10.1088/0960-1317/9/2/320

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JO - Journal of micromechanics and microengineering

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ER -

Bi-directional fast flow sensor with a large dynamic range

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Bi-directional fast flow sensor with a large dynamic range

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