Abstract
In this article an extended mass-flow is presented. Apart form the magnitude of the flow, as an add-on to the traditional anemometer, this sensor also measures the direction of the flow. This is of interrest for the flow sensor market in general, an more in particular for the safety monitoring of low overpressure systems like surgery and cleanrooms where the risk of reverse flow needs to be avoided at all times. It detects the smallest amount of gas-flow, down to approximately 100 um/s airflow up to high levels of 1 m/s The response time is in the order of milliseconds.
Original language | English |
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Title of host publication | MME '98 |
Subtitle of host publication | 9th Micromechanics Europe Workshop 1998, Proceedings |
Place of Publication | Oslo |
Publisher | SINTEF |
Pages | 194-197 |
Number of pages | 4 |
Publication status | Published - 3 Jun 1998 |
Event | 9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway Duration: 3 Jun 1998 → 5 Jun 1998 Conference number: 9 |
Conference
Conference | 9th Micromechanics Europe Workshop, MME 1998 |
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Abbreviated title | MME |
Country | Norway |
City | Ulvik |
Period | 3/06/98 → 5/06/98 |