Bi-directional fast flow sensor with a large dynamic range

Hans-Elias de Bree, Henri V. Jansen, Theo S.J. Lammerink, Gijs J.M. Krijnen, Miko Elwenspoek

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    In this article an extended mass-flow is presented. Apart form the magnitude of the flow, as an add-on to the traditional anemometer, this sensor also measures the direction of the flow. This is of interrest for the flow sensor market in general, an more in particular for the safety monitoring of low overpressure systems like surgery and cleanrooms where the risk of reverse flow needs to be avoided at all times. It detects the smallest amount of gas-flow, down to approximately 100 um/s airflow up to high levels of 1 m/s The response time is in the order of milliseconds.
    Original languageEnglish
    Title of host publicationMME '98
    Subtitle of host publication9th Micromechanics Europe Workshop 1998, Proceedings
    Place of PublicationOslo
    Number of pages4
    Publication statusPublished - 3 Jun 1998
    Event9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway
    Duration: 3 Jun 19985 Jun 1998
    Conference number: 9


    Conference9th Micromechanics Europe Workshop, MME 1998
    Abbreviated titleMME


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