Bi-directional fast flow sensor with a large dynamic range

Hans-Elias de Bree; Henri V. Jansen; Theo S.J. Lammerink; Gijs J.M. Krijnen; Miko Elwenspoek

Bi-directional fast flow sensor with a large dynamic range

Hans-Elias de Bree, Henri V. Jansen, Theo S.J. Lammerink, Gijs J.M. Krijnen, Miko Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

In this article an extended mass-flow is presented. Apart form the magnitude of the flow, as an add-on to the traditional anemometer, this sensor also measures the direction of the flow. This is of interrest for the flow sensor market in general, an more in particular for the safety monitoring of low overpressure systems like surgery and cleanrooms where the risk of reverse flow needs to be avoided at all times. It detects the smallest amount of gas-flow, down to approximately 100 um/s airflow up to high levels of 1 m/s The response time is in the order of milliseconds.

Original language	English
Title of host publication	MME '98
Subtitle of host publication	9th Micromechanics Europe Workshop 1998, Proceedings
Place of Publication	Oslo
Publisher	SINTEF
Pages	194-197
Number of pages	4
Publication status	Published - 3 Jun 1998
Event	9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway Duration: 3 Jun 1998 → 5 Jun 1998 Conference number: 9

Conference

Conference	9th Micromechanics Europe Workshop, MME 1998
Abbreviated title	MME
Country	Norway
City	Ulvik
Period	3/06/98 → 5/06/98

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@inproceedings{020222fcf03445d5b3cd669a3c56b464,

title = "Bi-directional fast flow sensor with a large dynamic range",

abstract = "In this article an extended mass-flow is presented. Apart form the magnitude of the flow, as an add-on to the traditional anemometer, this sensor also measures the direction of the flow. This is of interrest for the flow sensor market in general, an more in particular for the safety monitoring of low overpressure systems like surgery and cleanrooms where the risk of reverse flow needs to be avoided at all times. It detects the smallest amount of gas-flow, down to approximately 100 um/s airflow up to high levels of 1 m/s The response time is in the order of milliseconds.",

author = "{de Bree}, Hans-Elias and Jansen, {Henri V.} and Lammerink, {Theo S.J.} and Krijnen, {Gijs J.M.} and Miko Elwenspoek",

year = "1998",

month = jun,

day = "3",

language = "English",

pages = "194--197",

booktitle = "MME '98",

publisher = "SINTEF",

note = "9th Micromechanics Europe Workshop, MME 1998, MME ; Conference date: 03-06-1998 Through 05-06-1998",

}

Bi-directional fast flow sensor with a large dynamic range. / de Bree, Hans-Elias; Jansen, Henri V.; Lammerink, Theo S.J.; Krijnen, Gijs J.M.; Elwenspoek, Miko.

MME '98: 9th Micromechanics Europe Workshop 1998, Proceedings. Oslo : SINTEF, 1998. p. 194-197.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

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AU - de Bree, Hans-Elias

AU - Jansen, Henri V.

AU - Lammerink, Theo S.J.

AU - Krijnen, Gijs J.M.

AU - Elwenspoek, Miko

N1 - Conference code: 9

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Y1 - 1998/6/3

N2 - In this article an extended mass-flow is presented. Apart form the magnitude of the flow, as an add-on to the traditional anemometer, this sensor also measures the direction of the flow. This is of interrest for the flow sensor market in general, an more in particular for the safety monitoring of low overpressure systems like surgery and cleanrooms where the risk of reverse flow needs to be avoided at all times. It detects the smallest amount of gas-flow, down to approximately 100 um/s airflow up to high levels of 1 m/s The response time is in the order of milliseconds.

AB - In this article an extended mass-flow is presented. Apart form the magnitude of the flow, as an add-on to the traditional anemometer, this sensor also measures the direction of the flow. This is of interrest for the flow sensor market in general, an more in particular for the safety monitoring of low overpressure systems like surgery and cleanrooms where the risk of reverse flow needs to be avoided at all times. It detects the smallest amount of gas-flow, down to approximately 100 um/s airflow up to high levels of 1 m/s The response time is in the order of milliseconds.

M3 - Conference contribution

SP - 194

EP - 197

BT - MME '98

PB - SINTEF

CY - Oslo

T2 - 9th Micromechanics Europe Workshop, MME 1998

Y2 - 3 June 1998 through 5 June 1998

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