Bi-Directional MEMS Thermal Flow Sensor for Respiratory Applications

Research output: Contribution to conferencePaperpeer-review


This paper presents a MEMS bi-directional thermal flow sensor which consists of a pair of suspended thin wires. Wires are fabricated on both sides of the silicon wafer to form the upstream and downstream wires to measure the flow rate, and two more wires on the Si wafer to realize a Wheatstone bridge readout. Both wires
are used as heater and sensor elements at the same time. In this paper we present a finite element analysis using COMSOL Multiphysics as well as measurement results on a fabricated device using air flow up to 2 m/s.
Original languageEnglish
Publication statusPublished - 19 Sept 2022
EventMNE-EUROSENSORS 2022 - O&N II, Herestraat 49 , Leuven, Belgium
Duration: 19 Sept 202223 Sept 2022


ConferenceMNE-EUROSENSORS 2022
Internet address


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