Abstract
This paper presents a MEMS bi-directional thermal flow sensor which consists of a pair of suspended thin wires. Wires are fabricated on both sides of the silicon wafer to form the upstream and downstream wires to measure the flow rate, and two more wires on the Si wafer to realize a Wheatstone bridge readout. Both wires
are used as heater and sensor elements at the same time. In this paper we present a finite element analysis using COMSOL Multiphysics as well as measurement results on a fabricated device using air flow up to 2 m/s.
are used as heater and sensor elements at the same time. In this paper we present a finite element analysis using COMSOL Multiphysics as well as measurement results on a fabricated device using air flow up to 2 m/s.
Original language | English |
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Publication status | Published - 19 Sept 2022 |
Event | MNE-EUROSENSORS 2022 - O&N II, Herestraat 49 , Leuven, Belgium Duration: 19 Sept 2022 → 23 Sept 2022 https://www.mne2022.org/ |
Conference
Conference | MNE-EUROSENSORS 2022 |
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Country/Territory | Belgium |
City | Leuven |
Period | 19/09/22 → 23/09/22 |
Internet address |