Bi-Directional MEMS Thermal Flow Sensor for Respiratory Applications

Shirin Azadi Kenari; Remco J. Wiegerink; Joost Conrad Lötters

Bi-Directional MEMS Thermal Flow Sensor for Respiratory Applications

Shirin Azadi Kenari, Remco J. Wiegerink, Joost Conrad Lötters

Research output: Contribution to conference › Paper › peer-review

Abstract

This paper presents a MEMS bi-directional thermal flow sensor which consists of a pair of suspended thin wires. Wires are fabricated on both sides of the silicon wafer to form the upstream and downstream wires to measure the flow rate, and two more wires on the Si wafer to realize a Wheatstone bridge readout. Both wires
are used as heater and sensor elements at the same time. In this paper we present a finite element analysis using COMSOL Multiphysics as well as measurement results on a fabricated device using air flow up to 2 m/s.

Original language	English
Publication status	Published - 19 Sep 2022
Event	MNE-EUROSENSORS 2022 - O&N II, Herestraat 49 , Leuven, Belgium Duration: 19 Sep 2022 → 23 Sep 2022 https://www.mne2022.org/

Conference

Conference	MNE-EUROSENSORS 2022
Country/Territory	Belgium
City	Leuven
Period	19/09/22 → 23/09/22
Internet address	https://www.mne2022.org/

Cite this

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title = "Bi-Directional MEMS Thermal Flow Sensor for Respiratory Applications",

abstract = "This paper presents a MEMS bi-directional thermal flow sensor which consists of a pair of suspended thin wires. Wires are fabricated on both sides of the silicon wafer to form the upstream and downstream wires to measure the flow rate, and two more wires on the Si wafer to realize a Wheatstone bridge readout. Both wires are used as heater and sensor elements at the same time. In this paper we present a finite element analysis using COMSOL Multiphysics as well as measurement results on a fabricated device using air flow up to 2 m/s.",

author = "{Azadi Kenari}, Shirin and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad}",

year = "2022",

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day = "19",

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T1 - Bi-Directional MEMS Thermal Flow Sensor for Respiratory Applications

AU - Azadi Kenari, Shirin

AU - Wiegerink, Remco J.

AU - Lötters, Joost Conrad

PY - 2022/9/19

Y1 - 2022/9/19

N2 - This paper presents a MEMS bi-directional thermal flow sensor which consists of a pair of suspended thin wires. Wires are fabricated on both sides of the silicon wafer to form the upstream and downstream wires to measure the flow rate, and two more wires on the Si wafer to realize a Wheatstone bridge readout. Both wires are used as heater and sensor elements at the same time. In this paper we present a finite element analysis using COMSOL Multiphysics as well as measurement results on a fabricated device using air flow up to 2 m/s.

AB - This paper presents a MEMS bi-directional thermal flow sensor which consists of a pair of suspended thin wires. Wires are fabricated on both sides of the silicon wafer to form the upstream and downstream wires to measure the flow rate, and two more wires on the Si wafer to realize a Wheatstone bridge readout. Both wires are used as heater and sensor elements at the same time. In this paper we present a finite element analysis using COMSOL Multiphysics as well as measurement results on a fabricated device using air flow up to 2 m/s.

M3 - Paper

T2 - MNE-EUROSENSORS 2022

Y2 - 19 September 2022 through 23 September 2022

ER -

Bi-Directional MEMS Thermal Flow Sensor for Respiratory Applications

Abstract

Conference

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