Bidirectional electrostatic linear shuffle motor with two degrees of freedom

Edin Sarajlic; Johan W. Berenschot; H. Fujita; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.2005.1453949

Bidirectional electrostatic linear shuffle motor with two degrees of freedom

Edin Sarajlic, Johan W. Berenschot, H. Fujita, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

12 Citations (Scopus)

273 Downloads (Pure)

Abstract

We report on an electrostatic linear inchworm micromotor with two translational degrees-of-freedom. The motor employs built-in mechanical leverage to convert normal deflection of a flexible cross-plate into a small in-plane step and four electrostatic clamps to enable bidirectional inchworm motion in two orthogonal directions. The motor is realized in a relative simple fabrication process, which combines conventional surface micromachining with trench isolation. Operation in different stepping modes (fill, half and diagonal step) accompanied with high overall performance characteristics such as large force (0.64 mN) at moderate voltage (45V plate and 36V clamp), adjustable nanometer-resolution step size (41 nm to 63 nm), broad cycling frequency range (0 to SO kHZ), small dimension (482 pm x 482 pm) and large displacement range, makes this inchworm motor an attractive candidate for demanding positioning applications e.g. for (probe based) data storage.

Original language	Undefined
Title of host publication	18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.
Place of Publication	Los Alamitos
Publisher	IEEE
Pages	391-394
Number of pages	4
ISBN (Print)	0-7803-8732-5
DOIs	https://doi.org/10.1109/MEMSYS.2005.1453949
Publication status	Published - 2005
Event	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 - Fontainebleau Hilton Resort, Miami Beach, United States Duration: 30 Jan 2005 → 3 Feb 2005 Conference number: 18

Publication series

Name
Publisher	IEEE

Conference

Conference	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005
Abbreviated title	MEMS
Country/Territory	United States
City	Miami Beach
Period	30/01/05 → 3/02/05

Keywords

EWI-9915
IR-54434
METIS-228611

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/MEMSYS.2005.1453949

Cite this

@inproceedings{ebde82ba9d274847b37c670a7711e4bf,

title = "Bidirectional electrostatic linear shuffle motor with two degrees of freedom",

abstract = "We report on an electrostatic linear inchworm micromotor with two translational degrees-of-freedom. The motor employs built-in mechanical leverage to convert normal deflection of a flexible cross-plate into a small in-plane step and four electrostatic clamps to enable bidirectional inchworm motion in two orthogonal directions. The motor is realized in a relative simple fabrication process, which combines conventional surface micromachining with trench isolation. Operation in different stepping modes (fill, half and diagonal step) accompanied with high overall performance characteristics such as large force (0.64 mN) at moderate voltage (45V plate and 36V clamp), adjustable nanometer-resolution step size (41 nm to 63 nm), broad cycling frequency range (0 to SO kHZ), small dimension (482 pm x 482 pm) and large displacement range, makes this inchworm motor an attractive candidate for demanding positioning applications e.g. for (probe based) data storage.",

keywords = "EWI-9915, IR-54434, METIS-228611",

author = "Edin Sarajlic and Berenschot, {Johan W.} and H. Fujita and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "2005",

doi = "10.1109/MEMSYS.2005.1453949",

language = "Undefined",

isbn = "0-7803-8732-5",

publisher = "IEEE",

pages = "391--394",

booktitle = "18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.",

address = "United States",

note = "18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 ; Conference date: 30-01-2005 Through 03-02-2005",

}

Sarajlic, E, Berenschot, JW, Fujita, H, Krijnen, GJM & Elwenspoek, MC 2005, Bidirectional electrostatic linear shuffle motor with two degrees of freedom. in 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.. IEEE, Los Alamitos, pp. 391-394, 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005, Miami Beach, Florida, United States, 30/01/05. https://doi.org/10.1109/MEMSYS.2005.1453949

Bidirectional electrostatic linear shuffle motor with two degrees of freedom. / Sarajlic, Edin; Berenschot, Johan W.; Fujita, H. et al.
18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.. Los Alamitos: IEEE, 2005. p. 391-394.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Bidirectional electrostatic linear shuffle motor with two degrees of freedom

AU - Sarajlic, Edin

AU - Berenschot, Johan W.

AU - Fujita, H.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 18

PY - 2005

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N2 - We report on an electrostatic linear inchworm micromotor with two translational degrees-of-freedom. The motor employs built-in mechanical leverage to convert normal deflection of a flexible cross-plate into a small in-plane step and four electrostatic clamps to enable bidirectional inchworm motion in two orthogonal directions. The motor is realized in a relative simple fabrication process, which combines conventional surface micromachining with trench isolation. Operation in different stepping modes (fill, half and diagonal step) accompanied with high overall performance characteristics such as large force (0.64 mN) at moderate voltage (45V plate and 36V clamp), adjustable nanometer-resolution step size (41 nm to 63 nm), broad cycling frequency range (0 to SO kHZ), small dimension (482 pm x 482 pm) and large displacement range, makes this inchworm motor an attractive candidate for demanding positioning applications e.g. for (probe based) data storage.

AB - We report on an electrostatic linear inchworm micromotor with two translational degrees-of-freedom. The motor employs built-in mechanical leverage to convert normal deflection of a flexible cross-plate into a small in-plane step and four electrostatic clamps to enable bidirectional inchworm motion in two orthogonal directions. The motor is realized in a relative simple fabrication process, which combines conventional surface micromachining with trench isolation. Operation in different stepping modes (fill, half and diagonal step) accompanied with high overall performance characteristics such as large force (0.64 mN) at moderate voltage (45V plate and 36V clamp), adjustable nanometer-resolution step size (41 nm to 63 nm), broad cycling frequency range (0 to SO kHZ), small dimension (482 pm x 482 pm) and large displacement range, makes this inchworm motor an attractive candidate for demanding positioning applications e.g. for (probe based) data storage.

KW - EWI-9915

KW - IR-54434

KW - METIS-228611

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DO - 10.1109/MEMSYS.2005.1453949

M3 - Conference contribution

SN - 0-7803-8732-5

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EP - 394

BT - 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.

PB - IEEE

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T2 - 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005

Y2 - 30 January 2005 through 3 February 2005

ER -