Bidirectional electrostatic linear shuffle motor with two degrees of freedom

Edin Sarajlic, Johan W. Berenschot, H. Fujita, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    12 Citations (Scopus)
    271 Downloads (Pure)


    We report on an electrostatic linear inchworm micromotor with two translational degrees-of-freedom. The motor employs built-in mechanical leverage to convert normal deflection of a flexible cross-plate into a small in-plane step and four electrostatic clamps to enable bidirectional inchworm motion in two orthogonal directions. The motor is realized in a relative simple fabrication process, which combines conventional surface micromachining with trench isolation. Operation in different stepping modes (fill, half and diagonal step) accompanied with high overall performance characteristics such as large force (0.64 mN) at moderate voltage (45V plate and 36V clamp), adjustable nanometer-resolution step size (41 nm to 63 nm), broad cycling frequency range (0 to SO kHZ), small dimension (482 pm x 482 pm) and large displacement range, makes this inchworm motor an attractive candidate for demanding positioning applications e.g. for (probe based) data storage.
    Original languageUndefined
    Title of host publication18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.
    Place of PublicationLos Alamitos
    Number of pages4
    ISBN (Print)0-7803-8732-5
    Publication statusPublished - 2005
    Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 - Fontainebleau Hilton Resort, Miami Beach, United States
    Duration: 30 Jan 20053 Feb 2005
    Conference number: 18

    Publication series



    Conference18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005
    Abbreviated titleMEMS
    Country/TerritoryUnited States
    CityMiami Beach


    • EWI-9915
    • IR-54434
    • METIS-228611

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