Bidirectional electrostatic linear shuffle motor with two degrees of freedom

Edin Sarajlic, Johan W. Berenschot, H. Fujita, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    11 Citations (Scopus)
    146 Downloads (Pure)

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