TY - JOUR
T1 - Bifunctional catalytic effect of Mo2C/oxide interface on multi-layer graphene growth
AU - Kizir, Seda
AU - van den Beld, Wesley T.E.
AU - Schurink, Bart
AU - van de Kruijs, Robbert W.E.
AU - Benschop, Jos P.H.
AU - Bijkerk, Fred
N1 - Funding Information:
This work is supported by the Technology Foundation STW which is part of the Netherlands Organization for Scientific Research (NWO), (Top sector High Tech Systems and Materials Project 15357). We acknowledge the funding from NWO and ASML (Veldhoven). The authors thank the Industrial Focus Group XUV Optics at the University of Twente, for facilitating the research, and ASML, Carl Zeiss SMT, and Malvern Panalytical, for miscellaneous contributions. Also, the authors would like to thank Mark Smithers (MESA+ Nanolab) for his help with SEM measurements.
Publisher Copyright:
© 2021, The Author(s).
Financial transaction number:
342133787
PY - 2021/7/28
Y1 - 2021/7/28
N2 - The role of the Mo2C/oxide interface on multi-layer graphene (MLG) nucleation during a chemical vapor deposition (CVD) process is investigated. During the CVD process, MLG growth is only observed in the presence of a Mo2C/SiO2 interface, indicating that the chemical reactions occurring at this interface trigger the nucleation of MLG. The chemical reaction pathway is explained in four steps as (1) creation of H radicals, (2) reduction of the oxide surface, (3) formation of C–C bonds at O–H sites, and (4) expansion of graphitic domains on the Mo2C catalyst. Different Mo2C/oxide interfaces are investigated, with varying affinity for reduction in a hydrogen environment. The results demonstrate a catalyst/oxide bifunctionality on MLG nucleation, comprising of CH4 dehydrogenation by Mo2C and initial C–C bond formation at the oxide interface.
AB - The role of the Mo2C/oxide interface on multi-layer graphene (MLG) nucleation during a chemical vapor deposition (CVD) process is investigated. During the CVD process, MLG growth is only observed in the presence of a Mo2C/SiO2 interface, indicating that the chemical reactions occurring at this interface trigger the nucleation of MLG. The chemical reaction pathway is explained in four steps as (1) creation of H radicals, (2) reduction of the oxide surface, (3) formation of C–C bonds at O–H sites, and (4) expansion of graphitic domains on the Mo2C catalyst. Different Mo2C/oxide interfaces are investigated, with varying affinity for reduction in a hydrogen environment. The results demonstrate a catalyst/oxide bifunctionality on MLG nucleation, comprising of CH4 dehydrogenation by Mo2C and initial C–C bond formation at the oxide interface.
KW - UT-Gold-D
UR - http://www.scopus.com/inward/record.url?scp=85111627438&partnerID=8YFLogxK
U2 - 10.1038/s41598-021-94694-4
DO - 10.1038/s41598-021-94694-4
M3 - Article
C2 - 34321528
AN - SCOPUS:85111627438
SN - 2045-2322
VL - 11
JO - Scientific reports
JF - Scientific reports
IS - 1
M1 - 15377
ER -