@inproceedings{b1c97c7b6e9342e0aa23df927569e7ec,
title = "Bimorph based Active Joints for Nanometre scale Actuation",
abstract = "In this work the modelling of a micro bimorph cantilever which is composed of a Silicon Nitride cantilever beam coated on top with a thin Chromium layer is described. The structure functions as a vertical electrostatic actuator for nanometre displacements with stress induced upward curvature in the off-state. A detailed description of the optimisation of the resonance frequency of the cantilever as a function of the thickness of the chromium layer and the deflection of the cantilever is presented. The developed model suggests that resonance frequencies of several MHz can be obtained for structures providing nanometre scale stroke.",
keywords = "METIS-245739, EWI-11179, IR-64392",
author = "{Chakkalakkal Abdulla}, S.M. and Krijnen, {Gijsbertus J.M.}",
year = "2007",
month = nov,
day = "29",
language = "Undefined",
isbn = "978-90-73461-49-9",
publisher = "Dutch Technology Foundation",
number = "STW 200709",
pages = "568--571",
booktitle = "10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)",
note = "10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007 ; Conference date: 29-11-2007 Through 30-11-2007",
}