Bimorph based Active Joints for Nanometre scale Actuation

S.M. Chakkalakkal Abdulla, Gijsbertus J.M. Krijnen

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    Abstract

    In this work the modelling of a micro bimorph cantilever which is composed of a Silicon Nitride cantilever beam coated on top with a thin Chromium layer is described. The structure functions as a vertical electrostatic actuator for nanometre displacements with stress induced upward curvature in the off-state. A detailed description of the optimisation of the resonance frequency of the cantilever as a function of the thickness of the chromium layer and the deflection of the cantilever is presented. The developed model suggests that resonance frequencies of several MHz can be obtained for structures providing nanometre scale stroke.
    Original languageUndefined
    Title of host publication10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)
    Place of PublicationUtrecht
    PublisherDutch Technology Foundation
    Pages568-571
    Number of pages4
    ISBN (Print)978-90-73461-49-9
    Publication statusPublished - 29 Nov 2007
    Event10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007 - Veldhoven, Netherlands
    Duration: 29 Nov 200730 Nov 2007

    Publication series

    Name
    PublisherTechnology Foundation, STW
    NumberSTW 200709

    Workshop

    Workshop10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007
    CountryNetherlands
    CityVeldhoven
    Period29/11/0730/11/07

    Keywords

    • METIS-245739
    • EWI-11179
    • IR-64392

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