Bimorph based Active Joints for Nanometre scale Actuation

S.M. Chakkalakkal Abdulla; Gijsbertus J.M. Krijnen

Bimorph based Active Joints for Nanometre scale Actuation

S.M. Chakkalakkal Abdulla
, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

127 Downloads (Pure)

Abstract

In this work the modelling of a micro bimorph cantilever which is composed of a Silicon Nitride cantilever beam coated on top with a thin Chromium layer is described. The structure functions as a vertical electrostatic actuator for nanometre displacements with stress induced upward curvature in the off-state. A detailed description of the optimisation of the resonance frequency of the cantilever as a function of the thickness of the chromium layer and the deflection of the cantilever is presented. The developed model suggests that resonance frequencies of several MHz can be obtained for structures providing nanometre scale stroke.

Original language	Undefined
Title of host publication	10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)
Place of Publication	Utrecht
Publisher	Dutch Technology Foundation
Pages	568-571
Number of pages	4
ISBN (Print)	978-90-73461-49-9
Publication status	Published - 29 Nov 2007
Event	10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007 - Veldhoven, Netherlands Duration: 29 Nov 2007 → 30 Nov 2007

Publication series

Name
Publisher	Technology Foundation, STW
Number	STW 200709

Workshop

Workshop	10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007
Country/Territory	Netherlands
City	Veldhoven
Period	29/11/07 → 30/11/07

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 3 Good Health and Well-being

Keywords

METIS-245739
EWI-11179
IR-64392

Access to Document

Cite this

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title = "Bimorph based Active Joints for Nanometre scale Actuation",

abstract = "In this work the modelling of a micro bimorph cantilever which is composed of a Silicon Nitride cantilever beam coated on top with a thin Chromium layer is described. The structure functions as a vertical electrostatic actuator for nanometre displacements with stress induced upward curvature in the off-state. A detailed description of the optimisation of the resonance frequency of the cantilever as a function of the thickness of the chromium layer and the deflection of the cantilever is presented. The developed model suggests that resonance frequencies of several MHz can be obtained for structures providing nanometre scale stroke.",

keywords = "METIS-245739, EWI-11179, IR-64392",

author = "\{Chakkalakkal Abdulla\}, S.M. and Krijnen, \{Gijsbertus J.M.\}",

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day = "29",

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isbn = "978-90-73461-49-9",

publisher = "Dutch Technology Foundation",

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pages = "568--571",

booktitle = "10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)",

note = "10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007 ; Conference date: 29-11-2007 Through 30-11-2007",

}

Chakkalakkal Abdulla, SM & Krijnen, GJM 2007, Bimorph based Active Joints for Nanometre scale Actuation. in 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Dutch Technology Foundation, Utrecht, pp. 568-571, 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007, Veldhoven, Netherlands, 29/11/07.

Bimorph based Active Joints for Nanometre scale Actuation. / Chakkalakkal Abdulla, S.M.; Krijnen, Gijsbertus J.M.
10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE). Utrecht: Dutch Technology Foundation, 2007. p. 568-571.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Bimorph based Active Joints for Nanometre scale Actuation

AU - Chakkalakkal Abdulla, S.M.

AU - Krijnen, Gijsbertus J.M.

PY - 2007/11/29

Y1 - 2007/11/29

N2 - In this work the modelling of a micro bimorph cantilever which is composed of a Silicon Nitride cantilever beam coated on top with a thin Chromium layer is described. The structure functions as a vertical electrostatic actuator for nanometre displacements with stress induced upward curvature in the off-state. A detailed description of the optimisation of the resonance frequency of the cantilever as a function of the thickness of the chromium layer and the deflection of the cantilever is presented. The developed model suggests that resonance frequencies of several MHz can be obtained for structures providing nanometre scale stroke.

AB - In this work the modelling of a micro bimorph cantilever which is composed of a Silicon Nitride cantilever beam coated on top with a thin Chromium layer is described. The structure functions as a vertical electrostatic actuator for nanometre displacements with stress induced upward curvature in the off-state. A detailed description of the optimisation of the resonance frequency of the cantilever as a function of the thickness of the chromium layer and the deflection of the cantilever is presented. The developed model suggests that resonance frequencies of several MHz can be obtained for structures providing nanometre scale stroke.

KW - METIS-245739

KW - EWI-11179

KW - IR-64392

M3 - Conference contribution

SN - 978-90-73461-49-9

SP - 568

EP - 571

BT - 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)

PB - Dutch Technology Foundation

CY - Utrecht

T2 - 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007

Y2 - 29 November 2007 through 30 November 2007

ER -