Biomimetic aquatic hair sensors fabrication

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2 Downloads (Pure)

Abstract

A fabrication scheme to realize a flow sensor array for operation in liquid which biomimics fish lateral line is presented. To keep advantages of differential capacitive readout [1] we have designed a process for fabrication of thin, fully supported, flexible membranes with electrodes beneath them, on top of a substrate to prevent electrode/liquid contact and strong damping effects associated with liquid filling the gap between capacitor electrodes.
Original languageEnglish
Title of host publicationThe sense of contact, workshop sensortechnology
Place of PublicationThe Netherlands
PublisherSTW
Number of pages2
ISBN (Print)978-90-74702-55-3
Publication statusPublished - 8 Apr 2009
Event11th Sensor Technology Conference Sense of Contact 2009 - Zeist, Netherlands
Duration: 8 Apr 20098 Apr 2009
Conference number: 11

Workshop

Workshop11th Sensor Technology Conference Sense of Contact 2009
Abbreviated titleSense of Contact XI
CountryNetherlands
CityZeist
Period8/04/098/04/09

Fingerprint

Biomimetics
Fabrication
Electrodes
Sensors
Liquids
Sensor arrays
Contacts (fluid mechanics)
Fish
Capacitors
Damping
Membranes
Substrates

Keywords

  • TST-Life like
  • Biomimetic
  • SU-8
  • Membrane
  • Flow sensor

Cite this

Izadi, N., de Boer, M., Berenschot, E., Wiegerink, R., & Krijnen, G. J. M. (2009). Biomimetic aquatic hair sensors fabrication. In The sense of contact, workshop sensortechnology The Netherlands: STW.
Izadi, N. ; de Boer, M. ; Berenschot, E. ; Wiegerink, R. ; Krijnen, Gijs J.M. / Biomimetic aquatic hair sensors fabrication. The sense of contact, workshop sensortechnology. The Netherlands : STW, 2009.
@inproceedings{18c81d0a84c54ebc80e2830e380dd92d,
title = "Biomimetic aquatic hair sensors fabrication",
abstract = "A fabrication scheme to realize a flow sensor array for operation in liquid which biomimics fish lateral line is presented. To keep advantages of differential capacitive readout [1] we have designed a process for fabrication of thin, fully supported, flexible membranes with electrodes beneath them, on top of a substrate to prevent electrode/liquid contact and strong damping effects associated with liquid filling the gap between capacitor electrodes.",
keywords = "TST-Life like, Biomimetic, SU-8, Membrane, Flow sensor",
author = "N. Izadi and {de Boer}, M. and E. Berenschot and R. Wiegerink and Krijnen, {Gijs J.M.}",
year = "2009",
month = "4",
day = "8",
language = "English",
isbn = "978-90-74702-55-3",
booktitle = "The sense of contact, workshop sensortechnology",
publisher = "STW",

}

Izadi, N, de Boer, M, Berenschot, E, Wiegerink, R & Krijnen, GJM 2009, Biomimetic aquatic hair sensors fabrication. in The sense of contact, workshop sensortechnology. STW, The Netherlands, 11th Sensor Technology Conference Sense of Contact 2009, Zeist, Netherlands, 8/04/09.

Biomimetic aquatic hair sensors fabrication. / Izadi, N.; de Boer, M.; Berenschot, E.; Wiegerink, R.; Krijnen, Gijs J.M.

The sense of contact, workshop sensortechnology. The Netherlands : STW, 2009.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Biomimetic aquatic hair sensors fabrication

AU - Izadi, N.

AU - de Boer, M.

AU - Berenschot, E.

AU - Wiegerink, R.

AU - Krijnen, Gijs J.M.

PY - 2009/4/8

Y1 - 2009/4/8

N2 - A fabrication scheme to realize a flow sensor array for operation in liquid which biomimics fish lateral line is presented. To keep advantages of differential capacitive readout [1] we have designed a process for fabrication of thin, fully supported, flexible membranes with electrodes beneath them, on top of a substrate to prevent electrode/liquid contact and strong damping effects associated with liquid filling the gap between capacitor electrodes.

AB - A fabrication scheme to realize a flow sensor array for operation in liquid which biomimics fish lateral line is presented. To keep advantages of differential capacitive readout [1] we have designed a process for fabrication of thin, fully supported, flexible membranes with electrodes beneath them, on top of a substrate to prevent electrode/liquid contact and strong damping effects associated with liquid filling the gap between capacitor electrodes.

KW - TST-Life like

KW - Biomimetic

KW - SU-8

KW - Membrane

KW - Flow sensor

M3 - Conference contribution

SN - 978-90-74702-55-3

BT - The sense of contact, workshop sensortechnology

PB - STW

CY - The Netherlands

ER -

Izadi N, de Boer M, Berenschot E, Wiegerink R, Krijnen GJM. Biomimetic aquatic hair sensors fabrication. In The sense of contact, workshop sensortechnology. The Netherlands: STW. 2009