Biomimetic aquatic hair sensors fabrication

N. Izadi; M. de Boer; E. Berenschot; R. Wiegerink; Gijs J.M. Krijnen

Biomimetic aquatic hair sensors fabrication

N. Izadi, M. de Boer, E. Berenschot, R. Wiegerink, Gijs J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

27 Downloads (Pure)

Abstract

A fabrication scheme to realize a flow sensor array for operation in liquid which biomimics fish lateral line is presented. To keep advantages of differential capacitive readout [1] we have designed a process for fabrication of thin, fully supported, flexible membranes with electrodes beneath them, on top of a substrate to prevent electrode/liquid contact and strong damping effects associated with liquid filling the gap between capacitor electrodes.

Original language	English
Title of host publication	The sense of contact, workshop sensortechnology
Place of Publication	The Netherlands
Publisher	STW
Number of pages	2
ISBN (Print)	978-90-74702-55-3
Publication status	Published - 8 Apr 2009
Event	11th Sensor Technology Conference Sense of Contact 2009 - Zeist, Netherlands Duration: 8 Apr 2009 → 8 Apr 2009 Conference number: 11

Workshop

Workshop	11th Sensor Technology Conference Sense of Contact 2009
Abbreviated title	Sense of Contact XI
Country/Territory	Netherlands
City	Zeist
Period	8/04/09 → 8/04/09

Keywords

TST-Life like
Biomimetic
SU-8
Membrane
Flow sensor

Access to Document

Izadi2009biomimeticFinal published version, 121 KB

Cite this

@inproceedings{18c81d0a84c54ebc80e2830e380dd92d,

title = "Biomimetic aquatic hair sensors fabrication",

abstract = "A fabrication scheme to realize a flow sensor array for operation in liquid which biomimics fish lateral line is presented. To keep advantages of differential capacitive readout [1] we have designed a process for fabrication of thin, fully supported, flexible membranes with electrodes beneath them, on top of a substrate to prevent electrode/liquid contact and strong damping effects associated with liquid filling the gap between capacitor electrodes.",

keywords = "TST-Life like, Biomimetic, SU-8, Membrane, Flow sensor",

author = "N. Izadi and {de Boer}, M. and E. Berenschot and R. Wiegerink and Krijnen, {Gijs J.M.}",

year = "2009",

month = apr,

day = "8",

language = "English",

isbn = "978-90-74702-55-3",

booktitle = "The sense of contact, workshop sensortechnology",

publisher = "STW",

note = "11th Sensor Technology Conference Sense of Contact 2009, Sense of Contact XI ; Conference date: 08-04-2009 Through 08-04-2009",

}

TY - GEN

T1 - Biomimetic aquatic hair sensors fabrication

AU - Izadi, N.

AU - de Boer, M.

AU - Berenschot, E.

AU - Wiegerink, R.

AU - Krijnen, Gijs J.M.

N1 - Conference code: 11

PY - 2009/4/8

Y1 - 2009/4/8

N2 - A fabrication scheme to realize a flow sensor array for operation in liquid which biomimics fish lateral line is presented. To keep advantages of differential capacitive readout [1] we have designed a process for fabrication of thin, fully supported, flexible membranes with electrodes beneath them, on top of a substrate to prevent electrode/liquid contact and strong damping effects associated with liquid filling the gap between capacitor electrodes.

AB - A fabrication scheme to realize a flow sensor array for operation in liquid which biomimics fish lateral line is presented. To keep advantages of differential capacitive readout [1] we have designed a process for fabrication of thin, fully supported, flexible membranes with electrodes beneath them, on top of a substrate to prevent electrode/liquid contact and strong damping effects associated with liquid filling the gap between capacitor electrodes.

KW - TST-Life like

KW - Biomimetic

KW - SU-8

KW - Membrane

KW - Flow sensor

M3 - Conference contribution

SN - 978-90-74702-55-3

BT - The sense of contact, workshop sensortechnology

PB - STW

CY - The Netherlands

T2 - 11th Sensor Technology Conference Sense of Contact 2009

Y2 - 8 April 2009 through 8 April 2009

ER -

Biomimetic aquatic hair sensors fabrication

Abstract

Workshop

Keywords

Access to Document

Fingerprint

Cite this