Biomimetic aquatic hair sensors fabrication

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    A fabrication scheme to realize a flow sensor array for operation in liquid which biomimics fish lateral line is presented. To keep advantages of differential capacitive readout [1] we have designed a process for fabrication of thin, fully supported, flexible membranes with electrodes beneath them, on top of a substrate to prevent electrode/liquid contact and strong damping effects associated with liquid filling the gap between capacitor electrodes.
    Original languageEnglish
    Title of host publicationThe sense of contact, workshop sensortechnology
    Place of PublicationThe Netherlands
    Number of pages2
    ISBN (Print)978-90-74702-55-3
    Publication statusPublished - 8 Apr 2009
    Event11th Sensor Technology Conference Sense of Contact 2009 - Zeist, Netherlands
    Duration: 8 Apr 20098 Apr 2009
    Conference number: 11


    Workshop11th Sensor Technology Conference Sense of Contact 2009
    Abbreviated titleSense of Contact XI


    • TST-Life like
    • Biomimetic
    • SU-8
    • Membrane
    • Flow sensor


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