Biomimetic aquatic hair sensors fabrication

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    4 Downloads (Pure)

    Abstract

    A fabrication scheme to realize a flow sensor array for operation in liquid which biomimics fish lateral line is presented. To keep advantages of differential capacitive readout [1] we have designed a process for fabrication of thin, fully supported, flexible membranes with electrodes beneath them, on top of a substrate to prevent electrode/liquid contact and strong damping effects associated with liquid filling the gap between capacitor electrodes.
    Original languageEnglish
    Title of host publicationThe sense of contact, workshop sensortechnology
    Place of PublicationThe Netherlands
    PublisherSTW
    Number of pages2
    ISBN (Print)978-90-74702-55-3
    Publication statusPublished - 8 Apr 2009
    Event11th Sensor Technology Conference Sense of Contact 2009 - Zeist, Netherlands
    Duration: 8 Apr 20098 Apr 2009
    Conference number: 11

    Workshop

    Workshop11th Sensor Technology Conference Sense of Contact 2009
    Abbreviated titleSense of Contact XI
    CountryNetherlands
    CityZeist
    Period8/04/098/04/09

    Fingerprint

    Biomimetics
    Fabrication
    Electrodes
    Sensors
    Liquids
    Sensor arrays
    Contacts (fluid mechanics)
    Fish
    Capacitors
    Damping
    Membranes
    Substrates

    Keywords

    • TST-Life like
    • Biomimetic
    • SU-8
    • Membrane
    • Flow sensor

    Cite this

    Izadi, N., de Boer, M., Berenschot, E., Wiegerink, R., & Krijnen, G. J. M. (2009). Biomimetic aquatic hair sensors fabrication. In The sense of contact, workshop sensortechnology The Netherlands: STW.
    Izadi, N. ; de Boer, M. ; Berenschot, E. ; Wiegerink, R. ; Krijnen, Gijs J.M. / Biomimetic aquatic hair sensors fabrication. The sense of contact, workshop sensortechnology. The Netherlands : STW, 2009.
    @inproceedings{18c81d0a84c54ebc80e2830e380dd92d,
    title = "Biomimetic aquatic hair sensors fabrication",
    abstract = "A fabrication scheme to realize a flow sensor array for operation in liquid which biomimics fish lateral line is presented. To keep advantages of differential capacitive readout [1] we have designed a process for fabrication of thin, fully supported, flexible membranes with electrodes beneath them, on top of a substrate to prevent electrode/liquid contact and strong damping effects associated with liquid filling the gap between capacitor electrodes.",
    keywords = "TST-Life like, Biomimetic, SU-8, Membrane, Flow sensor",
    author = "N. Izadi and {de Boer}, M. and E. Berenschot and R. Wiegerink and Krijnen, {Gijs J.M.}",
    year = "2009",
    month = "4",
    day = "8",
    language = "English",
    isbn = "978-90-74702-55-3",
    booktitle = "The sense of contact, workshop sensortechnology",
    publisher = "STW",

    }

    Izadi, N, de Boer, M, Berenschot, E, Wiegerink, R & Krijnen, GJM 2009, Biomimetic aquatic hair sensors fabrication. in The sense of contact, workshop sensortechnology. STW, The Netherlands, 11th Sensor Technology Conference Sense of Contact 2009, Zeist, Netherlands, 8/04/09.

    Biomimetic aquatic hair sensors fabrication. / Izadi, N.; de Boer, M.; Berenschot, E.; Wiegerink, R.; Krijnen, Gijs J.M.

    The sense of contact, workshop sensortechnology. The Netherlands : STW, 2009.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    TY - GEN

    T1 - Biomimetic aquatic hair sensors fabrication

    AU - Izadi, N.

    AU - de Boer, M.

    AU - Berenschot, E.

    AU - Wiegerink, R.

    AU - Krijnen, Gijs J.M.

    PY - 2009/4/8

    Y1 - 2009/4/8

    N2 - A fabrication scheme to realize a flow sensor array for operation in liquid which biomimics fish lateral line is presented. To keep advantages of differential capacitive readout [1] we have designed a process for fabrication of thin, fully supported, flexible membranes with electrodes beneath them, on top of a substrate to prevent electrode/liquid contact and strong damping effects associated with liquid filling the gap between capacitor electrodes.

    AB - A fabrication scheme to realize a flow sensor array for operation in liquid which biomimics fish lateral line is presented. To keep advantages of differential capacitive readout [1] we have designed a process for fabrication of thin, fully supported, flexible membranes with electrodes beneath them, on top of a substrate to prevent electrode/liquid contact and strong damping effects associated with liquid filling the gap between capacitor electrodes.

    KW - TST-Life like

    KW - Biomimetic

    KW - SU-8

    KW - Membrane

    KW - Flow sensor

    M3 - Conference contribution

    SN - 978-90-74702-55-3

    BT - The sense of contact, workshop sensortechnology

    PB - STW

    CY - The Netherlands

    ER -

    Izadi N, de Boer M, Berenschot E, Wiegerink R, Krijnen GJM. Biomimetic aquatic hair sensors fabrication. In The sense of contact, workshop sensortechnology. The Netherlands: STW. 2009