We discuss current developments in biomimetic flow-sensors based on mechano-sensor as found e.g. on crickets and in the lateral line sensors of fish. Arrays of micromechanical acoustic-sensitive hair-sensors consisting of up to 1 mm long SU-8 hairs mounted on membranes forming variable capacitors for read-out are described. These sensors display great versatility by their arrayed nature, adaptivity and potential benefit of noise.
|Publisher||Chalmers University of Technology|
|Conference||Proceedings of 20th eurosensors conference|
|Period||17/09/06 → 20/09/06|
|Other||17-20 Sept. 2006|