Biomimetic, distributed micromechanical flow-sensing

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    Abstract

    We discuss current developments in biomimetic flow-sensors based on mechano-sensor as found e.g. on crickets and in the lateral line sensors of fish. Arrays of micromechanical acoustic-sensitive hair-sensors consisting of up to 1 mm long SU-8 hairs mounted on membranes forming variable capacitors for read-out are described. These sensors display great versatility by their arrayed nature, adaptivity and potential benefit of noise.
    Original languageUndefined
    Title of host publicationProceedings of 20th eurosensors conference
    Place of PublicationGötenborg
    PublisherChalmers University of Technology
    Pages1-2
    Number of pages2
    ISBN (Print)9163192810
    Publication statusPublished - 2006
    EventProceedings of 20th eurosensors conference - Göteborg - Sweden
    Duration: 17 Sep 200620 Sep 2006

    Publication series

    Name
    PublisherChalmers University of Technology
    NumberIEEE Produ

    Conference

    ConferenceProceedings of 20th eurosensors conference
    Period17/09/0620/09/06
    Other17-20 Sept. 2006

    Keywords

    • TST-SENSORS
    • METIS-238778
    • IR-66909
    • EWI-9187

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