Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets

Remco J. Wiegerink, J. Floris, R.K. Jaganatharaja, N. Izadi, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    10 Citations (Scopus)
    120 Downloads (Pure)


    In this paper we report on the latest developments in biomimetic flow-sensors based on the flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. Arrays of artificial hair sensors have been fabricated using a surface micromachining technology to form suspended silicon nitride membranes and double-layer SU-8 processing to form 1 mm long hairs. Previously, we have shown that these hairs are sensitive to low-frequency sound, using a laser vibrometer setup to detect the movements of the nitride membranes. We have now realized readout electronics to detect the movements capacitively, using electrodes integrated on the membranes.
    Original languageEnglish
    Title of host publicationSensors, IEEE 2007
    Place of PublicationLos Alamitos
    Number of pages4
    ISBN (Print)978-1-4244-1262-4
    Publication statusPublished - Oct 2007
    Event2007 IEEE Sensors - The Hyatt Regency Atlanta, Atlanta, United States
    Duration: 28 Oct 200731 Oct 2007

    Publication series

    PublisherIEEE Computer Society Press
    ISSN (Print)1930-0395


    Conference2007 IEEE Sensors
    Country/TerritoryUnited States


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