@inproceedings{54ac154d5cab4f09bb94d55c1b0c3b73,
title = "Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets",
abstract = "In this paper we report on the latest developments in biomimetic flow-sensors based on the flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. Arrays of artificial hair sensors have been fabricated using a surface micromachining technology to form suspended silicon nitride membranes and double-layer SU-8 processing to form 1 mm long hairs. Previously, we have shown that these hairs are sensitive to low-frequency sound, using a laser vibrometer setup to detect the movements of the nitride membranes. We have now realized readout electronics to detect the movements capacitively, using electrodes integrated on the membranes.",
keywords = "TST-Life like",
author = "Wiegerink, {Remco J.} and J. Floris and R.K. Jaganatharaja and N. Izadi and Lammerink, {Theodorus S.J.} and Krijnen, {Gijsbertus J.M.}",
note = "10.1109/ICSENS.2007.4388591 ; 2007 IEEE Sensors ; Conference date: 28-10-2007 Through 31-10-2007",
year = "2007",
month = oct,
doi = "10.1109/ICSENS.2007.4388591",
language = "English",
isbn = "978-1-4244-1262-4",
publisher = "IEEE",
pages = "1073--1076",
booktitle = "Sensors, IEEE 2007",
}