Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets

Remco J. Wiegerink; J. Floris; R.K. Jaganatharaja; N. Izadi; Theodorus S.J. Lammerink; Gijsbertus J.M. Krijnen

doi:10.1109/ICSENS.2007.4388591

Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets

Remco J. Wiegerink
, J. Floris
, R.K. Jaganatharaja
, N. Izadi
, Theodorus S.J. Lammerink
, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

10 Citations (Scopus)

240 Downloads (Pure)

Abstract

In this paper we report on the latest developments in biomimetic flow-sensors based on the flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. Arrays of artificial hair sensors have been fabricated using a surface micromachining technology to form suspended silicon nitride membranes and double-layer SU-8 processing to form 1 mm long hairs. Previously, we have shown that these hairs are sensitive to low-frequency sound, using a laser vibrometer setup to detect the movements of the nitride membranes. We have now realized readout electronics to detect the movements capacitively, using electrodes integrated on the membranes.

Original language	English
Title of host publication	Sensors, IEEE 2007
Place of Publication	Los Alamitos
Publisher	IEEE
Pages	1073-1076
Number of pages	4
ISBN (Print)	978-1-4244-1262-4
DOIs	https://doi.org/10.1109/ICSENS.2007.4388591
Publication status	Published - Oct 2007
Event	2007 IEEE Sensors - The Hyatt Regency Atlanta, Atlanta, United States Duration: 28 Oct 2007 → 31 Oct 2007

Publication series

Name
Publisher	IEEE Computer Society Press
ISSN (Print)	1930-0395

Conference

Conference	2007 IEEE Sensors
Country/Territory	United States
City	Atlanta
Period	28/10/07 → 31/10/07

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

TST-Life like

Access to Document

10.1109/ICSENS.2007.4388591

IEEESensors2

Cite this

@inproceedings{54ac154d5cab4f09bb94d55c1b0c3b73,

title = "Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets",

abstract = "In this paper we report on the latest developments in biomimetic flow-sensors based on the flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. Arrays of artificial hair sensors have been fabricated using a surface micromachining technology to form suspended silicon nitride membranes and double-layer SU-8 processing to form 1 mm long hairs. Previously, we have shown that these hairs are sensitive to low-frequency sound, using a laser vibrometer setup to detect the movements of the nitride membranes. We have now realized readout electronics to detect the movements capacitively, using electrodes integrated on the membranes.",

keywords = "TST-Life like",

author = "Wiegerink, \{Remco J.\} and J. Floris and R.K. Jaganatharaja and N. Izadi and Lammerink, \{Theodorus S.J.\} and Krijnen, \{Gijsbertus J.M.\}",

note = "10.1109/ICSENS.2007.4388591 ; 2007 IEEE Sensors ; Conference date: 28-10-2007 Through 31-10-2007",

year = "2007",

month = oct,

doi = "10.1109/ICSENS.2007.4388591",

language = "English",

isbn = "978-1-4244-1262-4",

publisher = "IEEE",

pages = "1073--1076",

booktitle = "Sensors, IEEE 2007",

address = "United States",

}

TY - GEN

T1 - Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets

AU - Wiegerink, Remco J.

AU - Floris, J.

AU - Jaganatharaja, R.K.

AU - Izadi, N.

AU - Lammerink, Theodorus S.J.

AU - Krijnen, Gijsbertus J.M.

N1 - 10.1109/ICSENS.2007.4388591

PY - 2007/10

Y1 - 2007/10

N2 - In this paper we report on the latest developments in biomimetic flow-sensors based on the flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. Arrays of artificial hair sensors have been fabricated using a surface micromachining technology to form suspended silicon nitride membranes and double-layer SU-8 processing to form 1 mm long hairs. Previously, we have shown that these hairs are sensitive to low-frequency sound, using a laser vibrometer setup to detect the movements of the nitride membranes. We have now realized readout electronics to detect the movements capacitively, using electrodes integrated on the membranes.

AB - In this paper we report on the latest developments in biomimetic flow-sensors based on the flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. Arrays of artificial hair sensors have been fabricated using a surface micromachining technology to form suspended silicon nitride membranes and double-layer SU-8 processing to form 1 mm long hairs. Previously, we have shown that these hairs are sensitive to low-frequency sound, using a laser vibrometer setup to detect the movements of the nitride membranes. We have now realized readout electronics to detect the movements capacitively, using electrodes integrated on the membranes.

KW - TST-Life like

U2 - 10.1109/ICSENS.2007.4388591

DO - 10.1109/ICSENS.2007.4388591

M3 - Conference contribution

SN - 978-1-4244-1262-4

SP - 1073

EP - 1076

BT - Sensors, IEEE 2007

PB - IEEE

CY - Los Alamitos

T2 - 2007 IEEE Sensors

Y2 - 28 October 2007 through 31 October 2007

ER -

Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets

Abstract

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UN SDGs

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