Biomimetic micromechanical adaptive flow-sensor arrays

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    Abstract

    We report current developments in biomimetic flow-sensors based on flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. In this work we describe hair-sensors fabricated by a combination of sacrificial poly-silicon technology, to form silicon-nitride suspended membranes, and SU8 polymer processing for fabrication of hairs with diameters of about 50 �?�m and up to 1 mm length. The membranes have thin chromium electrodes on top forming variable capacitors with the substrate that allow for capacitive read-out. Previously these sensors have been shown to exhibit acoustic sensitivity. Like for the crickets, the MEMS hair-sensors are positioned on elongated structures, resembling the cercus of crickets. In this work we present optical measurements on acoustically and electrostatically excited hair-sensors. We present adaptive control of flow-sensitivity and resonance frequency by electrostatic spring stiffness softening. Experimental data and simple analytical models derived from transduction theory are shown to exhibit good correspondence, both confirming theory and the applicability of the presented approach towards adaptation
    Original languageUndefined
    Title of host publicationProceedings of "SPIE Europe Microtechnologies for the New Millennium 2007"
    Place of PublicationBellingham
    PublisherSPIE
    Pages65920F
    Number of pages15
    ISBN (Print)978-0-8194-6726-3
    DOIs
    Publication statusPublished - 2 May 2007

    Publication series

    NameProceedings of SPIE, Bioengineered and Bioinspired Systems
    PublisherSPIE
    NumberWP07-01
    Volume6592
    ISSN (Print)0277-786X

    Keywords

    • TST-Life like
    • TST-SENSORS
    • MEMS
    • capacitive sensing
    • mechano-sensory hairs
    • spring-softening
    • Drag force
    • METIS-241615
    • IR-67093
    • Biomimetics
    • Adaptation
    • Flow sensors
    • EWI-9775

    Cite this

    Krijnen, G. J. M., Floris, J., Dijkstra, M., Lammerink, T. S. J., & Wiegerink, R. J. (2007). Biomimetic micromechanical adaptive flow-sensor arrays. In Proceedings of "SPIE Europe Microtechnologies for the New Millennium 2007" (pp. 65920F). [10.1117/12.721807] (Proceedings of SPIE, Bioengineered and Bioinspired Systems; Vol. 6592, No. WP07-01). Bellingham: SPIE. https://doi.org/10.1117/12.721807