Biomimetic micromechanical adaptive flow-sensor arrays

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

We report current developments in biomimetic flow-sensors based on flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. In this work we describe hair-sensors fabricated by a combination of sacrificial poly-silicon technology, to form silicon-nitride suspended membranes, and SU8 polymer processing for fabrication of hairs with diameters of about 50 �?�m and up to 1 mm length. The membranes have thin chromium electrodes on top forming variable capacitors with the substrate that allow for capacitive read-out. Previously these sensors have been shown to exhibit acoustic sensitivity. Like for the crickets, the MEMS hair-sensors are positioned on elongated structures, resembling the cercus of crickets. In this work we present optical measurements on acoustically and electrostatically excited hair-sensors. We present adaptive control of flow-sensitivity and resonance frequency by electrostatic spring stiffness softening. Experimental data and simple analytical models derived from transduction theory are shown to exhibit good correspondence, both confirming theory and the applicability of the presented approach towards adaptation
Original languageUndefined
Title of host publicationProceedings of "SPIE Europe Microtechnologies for the New Millennium 2007"
Place of PublicationBellingham
PublisherSPIE
Pages65920F
Number of pages15
ISBN (Print)978-0-8194-6726-3
DOIs
Publication statusPublished - 2 May 2007

Publication series

NameProceedings of SPIE, Bioengineered and Bioinspired Systems
PublisherSPIE
NumberWP07-01
Volume6592
ISSN (Print)0277-786X

Keywords

  • TST-Life like
  • TST-SENSORS
  • MEMS
  • capacitive sensing
  • mechano-sensory hairs
  • spring-softening
  • Drag force
  • METIS-241615
  • IR-67093
  • Biomimetics
  • Adaptation
  • Flow sensors
  • EWI-9775

Cite this

Krijnen, G. J. M., Floris, J., Dijkstra, M., Lammerink, T. S. J., & Wiegerink, R. J. (2007). Biomimetic micromechanical adaptive flow-sensor arrays. In Proceedings of "SPIE Europe Microtechnologies for the New Millennium 2007" (pp. 65920F). [10.1117/12.721807] (Proceedings of SPIE, Bioengineered and Bioinspired Systems; Vol. 6592, No. WP07-01). Bellingham: SPIE. https://doi.org/10.1117/12.721807
Krijnen, Gijsbertus J.M. ; Floris, J. ; Dijkstra, Marcel ; Lammerink, Theodorus S.J. ; Wiegerink, Remco J. / Biomimetic micromechanical adaptive flow-sensor arrays. Proceedings of "SPIE Europe Microtechnologies for the New Millennium 2007". Bellingham : SPIE, 2007. pp. 65920F (Proceedings of SPIE, Bioengineered and Bioinspired Systems; WP07-01).
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title = "Biomimetic micromechanical adaptive flow-sensor arrays",
abstract = "We report current developments in biomimetic flow-sensors based on flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. In this work we describe hair-sensors fabricated by a combination of sacrificial poly-silicon technology, to form silicon-nitride suspended membranes, and SU8 polymer processing for fabrication of hairs with diameters of about 50 �?�m and up to 1 mm length. The membranes have thin chromium electrodes on top forming variable capacitors with the substrate that allow for capacitive read-out. Previously these sensors have been shown to exhibit acoustic sensitivity. Like for the crickets, the MEMS hair-sensors are positioned on elongated structures, resembling the cercus of crickets. In this work we present optical measurements on acoustically and electrostatically excited hair-sensors. We present adaptive control of flow-sensitivity and resonance frequency by electrostatic spring stiffness softening. Experimental data and simple analytical models derived from transduction theory are shown to exhibit good correspondence, both confirming theory and the applicability of the presented approach towards adaptation",
keywords = "TST-Life like, TST-SENSORS, MEMS, capacitive sensing, mechano-sensory hairs, spring-softening, Drag force, METIS-241615, IR-67093, Biomimetics, Adaptation, Flow sensors, EWI-9775",
author = "Krijnen, {Gijsbertus J.M.} and J. Floris and Marcel Dijkstra and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.}",
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series = "Proceedings of SPIE, Bioengineered and Bioinspired Systems",
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Krijnen, GJM, Floris, J, Dijkstra, M, Lammerink, TSJ & Wiegerink, RJ 2007, Biomimetic micromechanical adaptive flow-sensor arrays. in Proceedings of "SPIE Europe Microtechnologies for the New Millennium 2007"., 10.1117/12.721807, Proceedings of SPIE, Bioengineered and Bioinspired Systems, no. WP07-01, vol. 6592, SPIE, Bellingham, pp. 65920F. https://doi.org/10.1117/12.721807

Biomimetic micromechanical adaptive flow-sensor arrays. / Krijnen, Gijsbertus J.M.; Floris, J.; Dijkstra, Marcel; Lammerink, Theodorus S.J.; Wiegerink, Remco J.

Proceedings of "SPIE Europe Microtechnologies for the New Millennium 2007". Bellingham : SPIE, 2007. p. 65920F 10.1117/12.721807 (Proceedings of SPIE, Bioengineered and Bioinspired Systems; Vol. 6592, No. WP07-01).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Biomimetic micromechanical adaptive flow-sensor arrays

AU - Krijnen, Gijsbertus J.M.

AU - Floris, J.

AU - Dijkstra, Marcel

AU - Lammerink, Theodorus S.J.

AU - Wiegerink, Remco J.

N1 - 10.1117/12.721807

PY - 2007/5/2

Y1 - 2007/5/2

N2 - We report current developments in biomimetic flow-sensors based on flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. In this work we describe hair-sensors fabricated by a combination of sacrificial poly-silicon technology, to form silicon-nitride suspended membranes, and SU8 polymer processing for fabrication of hairs with diameters of about 50 �?�m and up to 1 mm length. The membranes have thin chromium electrodes on top forming variable capacitors with the substrate that allow for capacitive read-out. Previously these sensors have been shown to exhibit acoustic sensitivity. Like for the crickets, the MEMS hair-sensors are positioned on elongated structures, resembling the cercus of crickets. In this work we present optical measurements on acoustically and electrostatically excited hair-sensors. We present adaptive control of flow-sensitivity and resonance frequency by electrostatic spring stiffness softening. Experimental data and simple analytical models derived from transduction theory are shown to exhibit good correspondence, both confirming theory and the applicability of the presented approach towards adaptation

AB - We report current developments in biomimetic flow-sensors based on flow sensitive mechano-sensors of crickets. Crickets have one form of acoustic sensing evolved in the form of mechanoreceptive sensory hairs. These filiform hairs are highly perceptive to low-frequency sound with energy sensitivities close to thermal threshold. In this work we describe hair-sensors fabricated by a combination of sacrificial poly-silicon technology, to form silicon-nitride suspended membranes, and SU8 polymer processing for fabrication of hairs with diameters of about 50 �?�m and up to 1 mm length. The membranes have thin chromium electrodes on top forming variable capacitors with the substrate that allow for capacitive read-out. Previously these sensors have been shown to exhibit acoustic sensitivity. Like for the crickets, the MEMS hair-sensors are positioned on elongated structures, resembling the cercus of crickets. In this work we present optical measurements on acoustically and electrostatically excited hair-sensors. We present adaptive control of flow-sensitivity and resonance frequency by electrostatic spring stiffness softening. Experimental data and simple analytical models derived from transduction theory are shown to exhibit good correspondence, both confirming theory and the applicability of the presented approach towards adaptation

KW - TST-Life like

KW - TST-SENSORS

KW - MEMS

KW - capacitive sensing

KW - mechano-sensory hairs

KW - spring-softening

KW - Drag force

KW - METIS-241615

KW - IR-67093

KW - Biomimetics

KW - Adaptation

KW - Flow sensors

KW - EWI-9775

U2 - 10.1117/12.721807

DO - 10.1117/12.721807

M3 - Conference contribution

SN - 978-0-8194-6726-3

T3 - Proceedings of SPIE, Bioengineered and Bioinspired Systems

SP - 65920F

BT - Proceedings of "SPIE Europe Microtechnologies for the New Millennium 2007"

PB - SPIE

CY - Bellingham

ER -

Krijnen GJM, Floris J, Dijkstra M, Lammerink TSJ, Wiegerink RJ. Biomimetic micromechanical adaptive flow-sensor arrays. In Proceedings of "SPIE Europe Microtechnologies for the New Millennium 2007". Bellingham: SPIE. 2007. p. 65920F. 10.1117/12.721807. (Proceedings of SPIE, Bioengineered and Bioinspired Systems; WP07-01). https://doi.org/10.1117/12.721807