Biomolecular sensing using surface micromachined silicon plates

A.M. Zapata, Edwin Carlen, E.S. Kim, J. Hsiao, D. Traviglia, M.S. Weinberg

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)
    74 Downloads (Pure)

    Abstract

    Micromachined sensors to detect surface stress changes associated with interactions between an immobilized chemically selective receptor and a target analyte are presented. The top isolated sensing surface of a free-standing silicon plate is prepared with a thin Au layer, followed by a covalent attachment of chemical or biomolecule forming a chemically-selective surface. Surface stress changes in air are measured capacitively due to the formation of an alkanethiol self-assembled monolayer (SAM). Detection of biomolecular binding in liquid samples is measured optically using the streptavidin-biotin complex and AM. tuberculosis antigen-antibody system used for clinical tuberculosis (TB) diagnosis.
    Original languageUndefined
    Title of host publicationInternational Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS)
    EditorsG. Delapierre, R. Puers
    Place of PublicationPiscataway
    PublisherIEEE Computer Society Press
    Pages831-834
    Number of pages4
    ISBN (Print)1-4244-0842-3
    DOIs
    Publication statusPublished - 10 Jun 2007
    Event14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007 - Lyon, France
    Duration: 10 Jun 200714 Jun 2007
    Conference number: 14

    Publication series

    NameTRANSDUCERS
    PublisherIEEE Computer Society
    Number7
    Volume1

    Conference

    Conference14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007
    Abbreviated titleTRANSDUCERS 2007
    CountryFrance
    CityLyon
    Period10/06/0714/06/07

    Keywords

    • EWI-11910
    • METIS-246016
    • IR-64626

    Cite this

    Zapata, A. M., Carlen, E., Kim, E. S., Hsiao, J., Traviglia, D., & Weinberg, M. S. (2007). Biomolecular sensing using surface micromachined silicon plates. In G. Delapierre, & R. Puers (Eds.), International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS) (pp. 831-834). [10.1109/SENSOR.2007.4300259] (TRANSDUCERS; Vol. 1, No. 7). Piscataway: IEEE Computer Society Press. https://doi.org/10.1109/SENSOR.2007.4300259