Biomolecular sensing using surface micromachined silicon plates

A.M. Zapata; Edwin Carlen; E.S. Kim; J. Hsiao; D. Traviglia; M.S. Weinberg

doi:10.1109/SENSOR.2007.4300259

Biomolecular sensing using surface micromachined silicon plates

A.M. Zapata, Edwin Carlen, E.S. Kim, J. Hsiao, D. Traviglia, M.S. Weinberg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)

157 Downloads (Pure)

Abstract

Micromachined sensors to detect surface stress changes associated with interactions between an immobilized chemically selective receptor and a target analyte are presented. The top isolated sensing surface of a free-standing silicon plate is prepared with a thin Au layer, followed by a covalent attachment of chemical or biomolecule forming a chemically-selective surface. Surface stress changes in air are measured capacitively due to the formation of an alkanethiol self-assembled monolayer (SAM). Detection of biomolecular binding in liquid samples is measured optically using the streptavidin-biotin complex and AM. tuberculosis antigen-antibody system used for clinical tuberculosis (TB) diagnosis.

Original language	Undefined
Title of host publication	International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS)
Editors	G. Delapierre, R. Puers
Place of Publication	Piscataway
Publisher	IEEE
Pages	831-834
Number of pages	4
ISBN (Print)	1-4244-0842-3
DOIs	https://doi.org/10.1109/SENSOR.2007.4300259
Publication status	Published - 10 Jun 2007
Event	14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007 - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007 Conference number: 14

Publication series

Name	TRANSDUCERS
Publisher	IEEE Computer Society
Number	7
Volume	1

Conference

Conference	14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007
Abbreviated title	TRANSDUCERS 2007
Country/Territory	France
City	Lyon
Period	10/06/07 → 14/06/07

Keywords

EWI-11910
METIS-246016
IR-64626

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/SENSOR.2007.4300259

Cite this

Zapata, A. M., Carlen, E., Kim, E. S., Hsiao, J., Traviglia, D., & Weinberg, M. S. (2007). Biomolecular sensing using surface micromachined silicon plates. In G. Delapierre, & R. Puers (Eds.), International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS) (pp. 831-834). [10.1109/SENSOR.2007.4300259] (TRANSDUCERS; Vol. 1, No. 7). IEEE. https://doi.org/10.1109/SENSOR.2007.4300259

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title = "Biomolecular sensing using surface micromachined silicon plates",

abstract = "Micromachined sensors to detect surface stress changes associated with interactions between an immobilized chemically selective receptor and a target analyte are presented. The top isolated sensing surface of a free-standing silicon plate is prepared with a thin Au layer, followed by a covalent attachment of chemical or biomolecule forming a chemically-selective surface. Surface stress changes in air are measured capacitively due to the formation of an alkanethiol self-assembled monolayer (SAM). Detection of biomolecular binding in liquid samples is measured optically using the streptavidin-biotin complex and AM. tuberculosis antigen-antibody system used for clinical tuberculosis (TB) diagnosis.",

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Zapata, AM, Carlen, E, Kim, ES, Hsiao, J, Traviglia, D & Weinberg, MS 2007, Biomolecular sensing using surface micromachined silicon plates. in G Delapierre & R Puers (eds), International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS)., 10.1109/SENSOR.2007.4300259, TRANSDUCERS, no. 7, vol. 1, IEEE, Piscataway, pp. 831-834, 14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007, Lyon, France, 10/06/07. https://doi.org/10.1109/SENSOR.2007.4300259

Biomolecular sensing using surface micromachined silicon plates. / Zapata, A.M.; Carlen, Edwin; Kim, E.S. et al.
International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS). ed. / G. Delapierre; R. Puers. Piscataway: IEEE, 2007. p. 831-834 10.1109/SENSOR.2007.4300259 (TRANSDUCERS; Vol. 1, No. 7).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Biomolecular sensing using surface micromachined silicon plates

AU - Zapata, A.M.

AU - Carlen, Edwin

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AU - Hsiao, J.

AU - Traviglia, D.

AU - Weinberg, M.S.

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N2 - Micromachined sensors to detect surface stress changes associated with interactions between an immobilized chemically selective receptor and a target analyte are presented. The top isolated sensing surface of a free-standing silicon plate is prepared with a thin Au layer, followed by a covalent attachment of chemical or biomolecule forming a chemically-selective surface. Surface stress changes in air are measured capacitively due to the formation of an alkanethiol self-assembled monolayer (SAM). Detection of biomolecular binding in liquid samples is measured optically using the streptavidin-biotin complex and AM. tuberculosis antigen-antibody system used for clinical tuberculosis (TB) diagnosis.

AB - Micromachined sensors to detect surface stress changes associated with interactions between an immobilized chemically selective receptor and a target analyte are presented. The top isolated sensing surface of a free-standing silicon plate is prepared with a thin Au layer, followed by a covalent attachment of chemical or biomolecule forming a chemically-selective surface. Surface stress changes in air are measured capacitively due to the formation of an alkanethiol self-assembled monolayer (SAM). Detection of biomolecular binding in liquid samples is measured optically using the streptavidin-biotin complex and AM. tuberculosis antigen-antibody system used for clinical tuberculosis (TB) diagnosis.

KW - EWI-11910

KW - METIS-246016

KW - IR-64626

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DO - 10.1109/SENSOR.2007.4300259

M3 - Conference contribution

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BT - International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS)

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Zapata AM, Carlen E, Kim ES, Hsiao J, Traviglia D, Weinberg MS. Biomolecular sensing using surface micromachined silicon plates. In Delapierre G, Puers R, editors, International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS). Piscataway: IEEE. 2007. p. 831-834. 10.1109/SENSOR.2007.4300259. (TRANSDUCERS; 7). doi: 10.1109/SENSOR.2007.4300259