Biomolecular sensing using surface micromachined silicon plates

A.M. Zapata, Edwin Carlen, E.S. Kim, J. Hsiao, D. Traviglia, M.S. Weinberg

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)
55 Downloads (Pure)

Abstract

Micromachined sensors to detect surface stress changes associated with interactions between an immobilized chemically selective receptor and a target analyte are presented. The top isolated sensing surface of a free-standing silicon plate is prepared with a thin Au layer, followed by a covalent attachment of chemical or biomolecule forming a chemically-selective surface. Surface stress changes in air are measured capacitively due to the formation of an alkanethiol self-assembled monolayer (SAM). Detection of biomolecular binding in liquid samples is measured optically using the streptavidin-biotin complex and AM. tuberculosis antigen-antibody system used for clinical tuberculosis (TB) diagnosis.
Original languageUndefined
Title of host publicationInternational Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS)
EditorsG. Delapierre, R. Puers
Place of PublicationPiscataway
PublisherIEEE Computer Society Press
Pages831-834
Number of pages4
ISBN (Print)1-4244-0842-3
DOIs
Publication statusPublished - 10 Jun 2007
Event14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007 - Lyon, France
Duration: 10 Jun 200714 Jun 2007
Conference number: 14

Publication series

NameTRANSDUCERS
PublisherIEEE Computer Society
Number7
Volume1

Conference

Conference14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007
Abbreviated titleTRANSDUCERS 2007
CountryFrance
CityLyon
Period10/06/0714/06/07

Keywords

  • EWI-11910
  • METIS-246016
  • IR-64626

Cite this

Zapata, A. M., Carlen, E., Kim, E. S., Hsiao, J., Traviglia, D., & Weinberg, M. S. (2007). Biomolecular sensing using surface micromachined silicon plates. In G. Delapierre, & R. Puers (Eds.), International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS) (pp. 831-834). [10.1109/SENSOR.2007.4300259] (TRANSDUCERS; Vol. 1, No. 7). Piscataway: IEEE Computer Society Press. https://doi.org/10.1109/SENSOR.2007.4300259
Zapata, A.M. ; Carlen, Edwin ; Kim, E.S. ; Hsiao, J. ; Traviglia, D. ; Weinberg, M.S. / Biomolecular sensing using surface micromachined silicon plates. International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS). editor / G. Delapierre ; R. Puers. Piscataway : IEEE Computer Society Press, 2007. pp. 831-834 (TRANSDUCERS; 7).
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Zapata, AM, Carlen, E, Kim, ES, Hsiao, J, Traviglia, D & Weinberg, MS 2007, Biomolecular sensing using surface micromachined silicon plates. in G Delapierre & R Puers (eds), International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS)., 10.1109/SENSOR.2007.4300259, TRANSDUCERS, no. 7, vol. 1, IEEE Computer Society Press, Piscataway, pp. 831-834, 14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007, Lyon, France, 10/06/07. https://doi.org/10.1109/SENSOR.2007.4300259

Biomolecular sensing using surface micromachined silicon plates. / Zapata, A.M.; Carlen, Edwin; Kim, E.S.; Hsiao, J.; Traviglia, D.; Weinberg, M.S.

International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS). ed. / G. Delapierre; R. Puers. Piscataway : IEEE Computer Society Press, 2007. p. 831-834 10.1109/SENSOR.2007.4300259 (TRANSDUCERS; Vol. 1, No. 7).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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AB - Micromachined sensors to detect surface stress changes associated with interactions between an immobilized chemically selective receptor and a target analyte are presented. The top isolated sensing surface of a free-standing silicon plate is prepared with a thin Au layer, followed by a covalent attachment of chemical or biomolecule forming a chemically-selective surface. Surface stress changes in air are measured capacitively due to the formation of an alkanethiol self-assembled monolayer (SAM). Detection of biomolecular binding in liquid samples is measured optically using the streptavidin-biotin complex and AM. tuberculosis antigen-antibody system used for clinical tuberculosis (TB) diagnosis.

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Zapata AM, Carlen E, Kim ES, Hsiao J, Traviglia D, Weinberg MS. Biomolecular sensing using surface micromachined silicon plates. In Delapierre G, Puers R, editors, International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS). Piscataway: IEEE Computer Society Press. 2007. p. 831-834. 10.1109/SENSOR.2007.4300259. (TRANSDUCERS; 7). https://doi.org/10.1109/SENSOR.2007.4300259