Abstract
Micromachined sensors to detect surface stress changes associated with interactions between an immobilized chemically selective receptor and a target analyte are presented. The top isolated sensing surface of a free-standing silicon plate is prepared with a thin Au layer, followed by a covalent attachment of chemical or biomolecule forming a chemically-selective surface. Surface stress changes in air are measured capacitively due to the formation of an alkanethiol self-assembled monolayer (SAM). Detection of biomolecular binding in liquid samples is measured optically using the streptavidin-biotin complex and AM. tuberculosis antigen-antibody system used for clinical tuberculosis (TB) diagnosis.
| Original language | English |
|---|---|
| Title of host publication | TRANSDUCERS 2007 - International Solid-State Sensors, Actuators and Microsystems Conference |
| Editors | G. Delapierre, R. Puers |
| Place of Publication | Piscataway, NJ |
| Publisher | IEEE |
| Pages | 831-834 |
| Number of pages | 4 |
| ISBN (Electronic) | 1-4244-0842-3 (CD) |
| ISBN (Print) | 1-4244-0841-5 |
| DOIs | |
| Publication status | Published - 10 Jun 2007 |
| Event | 14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007 - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007 Conference number: 14 |
Publication series
| Name | Proceedings of TRANSDUCERS - International Solid-State Sensors, Actuators and Microsystems Conference |
|---|---|
| Publisher | IEEE Computer Society |
| Volume | 2007 |
| ISSN (Print) | 2159-547X |
| ISSN (Electronic) | 2164-1641 |
Conference
| Conference | 14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007 |
|---|---|
| Abbreviated title | TRANSDUCERS 2007 |
| Country/Territory | France |
| City | Lyon |
| Period | 10/06/07 → 14/06/07 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 3 Good Health and Well-being
Keywords
- n/a OA procedure
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