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Biomolecular sensing using surface micromachined silicon plates

  • A.M. Zapata
  • , E.T. Carlen
  • , E.S. Kim
  • , J. Hsiao
  • , D. Traviglia
  • , M.S. Weinberg

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    213 Downloads (Pure)

    Abstract

    Micromachined sensors to detect surface stress changes associated with interactions between an immobilized chemically selective receptor and a target analyte are presented. The top isolated sensing surface of a free-standing silicon plate is prepared with a thin Au layer, followed by a covalent attachment of chemical or biomolecule forming a chemically-selective surface. Surface stress changes in air are measured capacitively due to the formation of an alkanethiol self-assembled monolayer (SAM). Detection of biomolecular binding in liquid samples is measured optically using the streptavidin-biotin complex and AM. tuberculosis antigen-antibody system used for clinical tuberculosis (TB) diagnosis.
    Original languageEnglish
    Title of host publicationTRANSDUCERS 2007 - International Solid-State Sensors, Actuators and Microsystems Conference
    EditorsG. Delapierre, R. Puers
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages831-834
    Number of pages4
    ISBN (Electronic)1-4244-0842-3 (CD)
    ISBN (Print)1-4244-0841-5
    DOIs
    Publication statusPublished - 10 Jun 2007
    Event14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007 - Lyon, France
    Duration: 10 Jun 200714 Jun 2007
    Conference number: 14

    Publication series

    NameProceedings of TRANSDUCERS - International Solid-State Sensors, Actuators and Microsystems Conference
    PublisherIEEE Computer Society
    Volume2007
    ISSN (Print)2159-547X
    ISSN (Electronic)2164-1641

    Conference

    Conference14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007
    Abbreviated titleTRANSDUCERS 2007
    Country/TerritoryFrance
    CityLyon
    Period10/06/0714/06/07

    UN SDGs

    This output contributes to the following UN Sustainable Development Goals (SDGs)

    1. SDG 3 - Good Health and Well-being
      SDG 3 Good Health and Well-being

    Keywords

    • n/a OA procedure

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