Black silicon method XI: oxygen pulses in SF6 plasma

Henricus V. Jansen, Meint J. de Boer, Kechun Ma, Miriam Girones nogue, S. Unnikrishnan, M.C. Louwerse, Michael Curt Elwenspoek

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    27 Citations (Scopus)

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    Chemical Compounds

    Engineering & Materials Science