Blister mechanism in extreme ultraviolet multilayer mirrors

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 31 Aug 2015
Event31st European Conference on Surface Science, ECOSS 2015 - Barcelona, Spain
Duration: 31 Aug 20154 Sep 2015
Conference number: 31

Conference

Conference31st European Conference on Surface Science, ECOSS 2015
Abbreviated titleECOSS-31
CountrySpain
CityBarcelona
Period31/08/154/09/15

Keywords

  • METIS-311987

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